Micromachining Mo/AlN/Mo piezoelectric ring resonators

Massaro, Alessandro; Ingrosso, I.; Giordano, Cristian; Todaro, M. T.; Cingolani, R.; Vittorio, Massimo De; Passaseo, A.

doi:10.23919/eumc.2009.5296198

Cited by 5 publications

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Locally conformal FDTD modeling of MEMS-Based antenna sensors for melanoma detection

Caratelli

Yarovoy

Massaro

et al. 2011

2011 IEEE International Symposium on Medical Measurements and Applications

View full text Add to dashboard Cite

The full-wave characterization of reconfigurable antenna sensors for non-invasive detection of melanoma is presented. To this end, an enhanced locally conformal finitedifference time-domain numerical procedure, based on a suitable normalization of the electromagnetic field-related quantities, is adopted. In this way, a physical insight in wave diffraction phenomena occurring in the radar monitoring of skin cancers, as well as in the natural resonant processes responsible for the performance of the considered class of devices is achieved. This, in turn, is important in order to enhance the device reliability, so optimizing the design cycle. In this respect, a suitable microelectro-mechanical-system-based sensor layout is proposed.

show abstract

Locally conformal FDTD modeling of MEMS-Based antenna sensors for melanoma detection

Caratelli

Yarovoy

Massaro

et al. 2011

2011 IEEE International Symposium on Medical Measurements and Applications

View full text Add to dashboard Cite

show abstract

3d Fem Modeling and Technology of Piezoelectric Ring Mems Antenna

Massaro¹,

Cingolani²,

Passaseo³

2011

PIER C

View full text Add to dashboard Cite

Abstract-Actually MEMS technology allows to fabricate free standing and bended cantilevers by acting on stress/strain properties and thicknesses of materials. In particular, by means of MEMS technology it is possible to realize ring or spiral layouts with piezoelectric materials.The mechanical movement due to the piezoelectric resonance can be used in order to modulate a signal travelling in the MEMS and radiating in the free space as happens in antennas. In this work we provide an accurate study regarding the design approach of piezoelectric aluminium nitride (AlN) ring antenna. The study is developed by means of a tailored 3D FEM tool which allows to analyze the piezoelectric resonances and to design the ring micro-antenna in the THz range. Finally we provide the technology and we measure the piezoelectric resonances of ring antennas.

show abstract

New Approaches of Nanocomposite Materials for Electromagnetic Sensors and Robotics

Massaro

Spano

Caratelli

et al. 2013

Advanced Instrument Engineering

View full text Add to dashboard Cite

In this paper, the authors define new classes of devices based on nanocomposite materials (NMs). The work introduces approaches about the design and the experimental characterization of these materials. A wide range of applications is presented by discussing novel devices implemented by nanocomposite techniques including sensing and robotic in micro/nano scale. The approaches are oriented on the electromagnetic (EM) characterization of tailored devices such as sensors, and micro/nano antennas. New EM numerical approaches for the design are presented.

show abstract

Micromachining Mo/AlN/Mo piezoelectric ring resonators

Cited by 5 publications

References 8 publications

Locally conformal FDTD modeling of MEMS-Based antenna sensors for melanoma detection

Locally conformal FDTD modeling of MEMS-Based antenna sensors for melanoma detection

3d Fem Modeling and Technology of Piezoelectric Ring Mems Antenna

New Approaches of Nanocomposite Materials for Electromagnetic Sensors and Robotics

Contact Info

Product

Resources

About