Micromachining

Piljek, Petar; Keran, Zdenka; Math, Miljenko

doi:10.7906/indecs.12.1.1

Cited by 36 publications

(8 citation statements)

References 26 publications

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“…However, the characterization and exact cause of this effect remain a point of contention among researchers, indicating that many factors influence chip formation and material removal mechanisms at the microscale. In simple terms, size effect is a phenomenon that modifies the material removal and chip formation mechanisms at the microscale [ 57 ]. In conventional milling, the shearing mode of material removal dominates, which leads to chip formation.…”

Section: Fundamentals Of the Processmentioning

confidence: 99%

Precision micro-milling process: state of the art

2020

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Micro-milling is a precision manufacturing process with broad applications across the biomedical, electronics, aerospace, and aeronautical industries owing to its versatility, capability, economy, and efficiency in a wide range of materials. In particular, the micro-milling process is highly suitable for very precise and accurate machining of mold prototypes with high aspect ratios in the microdomain, as well as for rapid micro-texturing and micro-patterning, which will have great importance in the near future in bio-implant manufacturing. This is particularly true for machining of typical difficult-to-machine materials commonly found in both the mold and orthopedic implant industries. However, inherent physical process constraints of machining arise as macro-milling is scaled down to the microdomain. This leads to some physical phenomena during micro-milling such as chip formation, size effect, and process instabilities. These dynamic physical process phenomena are introduced and discussed in detail. It is important to remember that these phenomena have multifactor effects during micro-milling, which must be taken into consideration to maximize the performance of the process. The most recent research on the micro-milling process inputs is discussed in detail from a process output perspective to determine how the process as a whole can be improved. Additionally, newly developed processes that combine conventional micro-milling with other technologies, which have great prospects in reducing the issues related to the physical process phenomena, are also introduced. Finally, the major applications of this versatile precision machining process are discussed with important insights into how the application range may be further broadened.

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Section: Fundamentals Of the Processmentioning

confidence: 99%

Precision micro-milling process: state of the art

2020

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Section: Introductionmentioning

confidence: 99%

Microreactor-based micro/nanomaterials: fabrication, advances, and outlook

et al. 2023

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“…This technique allows forming of 3D geometry directly in the wafer/substrate. The other one is micromachining [17][18][19][20]. It is a mechanical micro cutting technique (micro milling, micro drilling, etc.)…”

Section: Introductionmentioning

confidence: 99%

Wideband MOEMS for the Calibration of Optical Readout Systems

Volkov

Luk’yanov

Goryunov

et al. 2021

Sensors

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The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.

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Micromachining

Cited by 36 publications

References 26 publications

Precision micro-milling process: state of the art

Precision micro-milling process: state of the art

Microreactor-based micro/nanomaterials: fabrication, advances, and outlook

Wideband MOEMS for the Calibration of Optical Readout Systems

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