Micromachining and mechanical properties of GaInAs/InP microcantilevers

Mounaix, Patrick; Delobelle, P.; Melique, X.; Bornier, L.; Lippens, D.

doi:10.1016/s0921-5107(97)00271-7

Cited by 18 publications

(7 citation statements)

References 8 publications

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“…2(d)). Next, with the help of photolithography and a hydrochloric acid (HCl) based wet-etching solution, we remove a substantial amount of InP substrate below InGaAsP [22][23][24]. In step e, the areas to be wet-etched are opened in the negative-tone NR9-1500PY photoresist spun at 3500 rpm for 40 s to yield a thickness of 1.5 μm.…”

Section: Device Famentioning

confidence: 99%

Mechanically stable conjugate and suspended lasing membranes of bridged nano-cylinders

Kodigala¹,

Gu²,

Lepetit³

et al. 2017

Opt. Mater. Express

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We present two different fabrication approaches for a suspended lasing membrane with intricate sub-micron patterning for an InGaAsP/InP platform. One approach involves a hydrogen silsesquioxane (HSQ) electron beam lithography resist as a dry etch hard mask and another with an added chromium (Cr) hard mask. The Cr hard mask process allows for fine control over patterned dimensions in comparison to the HSQ mask. This is crucial to both membrane stability and device performance. Both approaches are heavily susceptible to dry etch requirements and the etching window used for membrane release. The techniques presented here are of practical interest to the design of membrane based devices with applications in microfluidic biosensors and flexible laser membranes.

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Section: Device Famentioning

confidence: 99%

Mechanically stable conjugate and suspended lasing membranes of bridged nano-cylinders

Kodigala¹,

Gu²,

Lepetit³

et al. 2017

Opt. Mater. Express

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show abstract

“…In order to obtain the hardness and Young's moduli of the specimens experimentally, a nanoindentation method utilizing a Vickers diamond indenter was used at room temperature [16][17][18]. Each side of a sample was polished to yield a mirror face using diamond pastes.…”

Section: Nanoindentation Testmentioning

confidence: 99%

Hardness and Young's modulus of nanoporous EB-PVD YSZ coatings by nanoindentation

Jang

Matsubara

2005

Journal of Alloys and Compounds

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“…HCl etches the InP layer at a much faster rate than it does the active waveguide layer ͓composed of lower phosphorous ͑P͒ percentage alloys of InAsP and InGaAsP compounds͔, providing the necessary degree of etch selectivity. 15 The resolution and selectivity of the etch are improved by cooling the solution in an ice-water bath to ϳ4°C, thereby reducing the material etch rates and, in particular, the total amount of waveguide material that is necessarily etched. The typical time to fully undercut the membrane was ϳ12 min ͑depending on the lattice spacing and hole size of the PC pattern͒.…”

Section: B Inaspõingaasp Membrane Etch and Undercutmentioning

confidence: 99%

Fabrication of high-quality-factor photonic crystal microcavities in InAsP/InGaAsP membranes

Srinivasan

Barclay

Painter

et al. 2004

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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. 83, 1915 ͑2003͔͒ resonant mode linewidths of 0.10 nm ͑corresponding to a quality factor ϳ1.3ϫ10 4 ) were measured in a photonic crystal defect microcavity fabricated in an InAsP/ InGaAsP multi-quantum-well membrane. The quality of device fabrication is of critical importance in the performance of these devices. Here, we present the results of key processing steps, including inductively coupled plasma reactive ion etching of a SiO 2 mask and the InAsP/InGaAsP membrane, and a selective undercut wet etch of an underlying sacrificial InP layer to create the freestanding membrane. The importance of etching through the membrane layer deeply into the sacrificial InP layer is highlighted, and discussed in the context of the crystallographic nature of the undercut wet etch process. The results of device processing are compared with previous work done using a chemically assisted ion-beam etch, and a discussion of the benefits of the current approach is given.

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Micromachining and mechanical properties of GaInAs/InP microcantilevers

Cited by 18 publications

References 8 publications

Mechanically stable conjugate and suspended lasing membranes of bridged nano-cylinders

Mechanically stable conjugate and suspended lasing membranes of bridged nano-cylinders

Hardness and Young's modulus of nanoporous EB-PVD YSZ coatings by nanoindentation

Fabrication of high-quality-factor photonic crystal microcavities in InAsP/InGaAsP membranes

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