Micromachining and Its Applications for Electronics

Abstract

Micromachining has emerged as a foundational technology in modern electronics, playing a crucial role in the creation of miniaturized and high-performance devices. Its significance is particularly pronounced in the domains of high-frequency RF devices and Terahertz communication, where the demand for precision, miniaturization, and performance enhancement is of utmost importance. The requirement of linear tolerances are of the order of 1–5 μm, surface toughness of 40–50 nm Ra and flatness of 0.3 μm.