2020
DOI: 10.1177/2516598419895828
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Micromachining: An overview (Part I)

Abstract: This article gives classification of micromanufacturing in general and micromachining processes in particular. For different micromachining processes, one can have different kinds of operations through which different features, shapes, accuracy, precision, and dimensions can be achieved. This article as Part I reports an overview of only three processes as diamond turn machining (a class of traditional micromachining processes), electrochemical micromachining, and focused-ion-beam micromachining (a class of ad… Show more

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Cited by 15 publications
(2 citation statements)
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References 77 publications
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“…[1][2][3][4] In the last decades, there has been a significant advancement in various manufacturing processes such as focused ion beam machining, 5,6 electrochemical machining, 7 electric discharge machining, [8][9][10] and micromilling 11 for the manufacturing of complicated features. 12 All these processes have their own advantages and limitations in manufacturing. Another technique that overcomes several limitations of the abovementioned machining process is laser micromachining technique.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] In the last decades, there has been a significant advancement in various manufacturing processes such as focused ion beam machining, 5,6 electrochemical machining, 7 electric discharge machining, [8][9][10] and micromilling 11 for the manufacturing of complicated features. 12 All these processes have their own advantages and limitations in manufacturing. Another technique that overcomes several limitations of the abovementioned machining process is laser micromachining technique.…”
Section: Introductionmentioning
confidence: 99%
“…3 Out of the above processes, electrochemical micromachining (EMM) is gaining popularity for micro-tool fabrication. It removes material by an anodic dissolution process, which produces a surface with no residual stress, 4, 5 which is disadvantageous in thermal processes like EDM and laser machining. The fabrication of micro-tools with a diameter of less than 100 µm is often difficult in conventional machining as they get easily deformed due to the lateral force.…”
Section: Introductionmentioning
confidence: 99%