Micromachined wavelength tunable laser with an extended feedback model

Liu, A.Q.; Zhang, Xuming; Murukeshan, Vadakke Matham; Lu, Chao; Cheng, Tee-Hiang

doi:10.1109/2944.991401

Cited by 29 publications

(18 citation statements)

References 10 publications

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“…The wavelength tuning is obtained by translation of the external mirror to introduce mode hopping over the cavity modes in addition to the possible small wavelength shift of the modes. The range of wavelength change is typically 1-20 nm, depending on the cavity length, feedback strength, and other laser parameters [1], [3], [4], [7], [14]. Such lasers do not need a pivot to rotate the mirror and, thus, have a simple structure, but they cannot reach some wavelengths within their tuning range since the tuning is not continuous.…”

Section: A Applications Of Pivot To Mems Tunable Lasersmentioning

confidence: 98%

A Real Pivot Structure for MEMS Tunable Lasers

Zhang

Liu

et al. 2007

J. Microelectromech. Syst.

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This paper presents the design of a real pivot formed by a double-clamped beam for the rotational tuning structures in microelectromechanical systems (MEMS) tunable lasers. Micromechanical properties such as beam deformation, pivot position and pivot shift are investigated and compared with the virtual pivot formed by a cantilever beam. It is shown that the real pivot has negligible shift when subjected to load and fabrication error owing to its feature of structural symmetry, while the virtual pivot suffers from significant pivot shift, which would severely limit the wavelength tuning range. The two pivot designs are implemented into MEMS tuning structures that are fabricated by deep etching and released using a dry release approach. The real pivot measures a depth variation of 16% over the double-clamped beam but maintains the symmetry to the midpoint, and is still able to produce a rotation angle of 4.7 . In contrast, the virtual pivot has a depth reduction of 4% over the cantilever beam, but achieves only a 2.4 rotation due to the pull-in problem originated from the severe pivot shift. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust, and suitable for single-chip integration.[2006-0112]

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Section: A Applications Of Pivot To Mems Tunable Lasersmentioning

confidence: 98%

A Real Pivot Structure for MEMS Tunable Lasers

Zhang

Liu

et al. 2007

J. Microelectromech. Syst.

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“…The first-order approximation of the emission frequency ν and the output intensity I under a weak external feedback are given by [15][16][17] …”

Section: Theoretical Analysis For Detection Of Ri Of Cellsmentioning

confidence: 99%

Determining refractive index of single living cell using an integrated microchip

Liang

Liu

Lim

et al. 2007

Sensors and Actuators A: Physical

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“…n is the effective refractive index of the FP laser cavity, and d and L stand for the lengths of the laser cavity and the EC, respectively. Due to the existence of the external mirror F 3 , the effective reflectance r 2 eff of the mirror F 2 is given by [8][9][10][11] r 2 eff ϭ r 2 ϩr 3 exp͓ j2 L ͔ 1ϩr 2 r 3 exp͓ j2 L ͔ ϭr 2 f ͑ ,L ͒…”

mentioning

confidence: 99%

Discrete wavelength tunable laser using microelectromechanical systems technology

Zhang

Liu

Tang

et al. 2004

Applied Physics Letters

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A discrete wavelength tunable laser has been demonstrated using microelectromechanical systems (MEMS) technology. The laser system is formed by integrating a semiconductor laser, a single-mode optical fiber, and a MEMS mirror onto a single chip. It has overall dimensions of 1.5 mm×1 mm×0.6 mm (not including the optical fiber), and can be tuned to sweep a wavelength range of 13.5 nm within 1 ms. Unlike the conventional continuously tunable lasers, the laser system enables discrete wavelength tuning by making use of a short external cavity and weak feedback.

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Micromachined wavelength tunable laser with an extended feedback model

Cited by 29 publications

References 10 publications

A Real Pivot Structure for MEMS Tunable Lasers

A Real Pivot Structure for MEMS Tunable Lasers

Determining refractive index of single living cell using an integrated microchip

Discrete wavelength tunable laser using microelectromechanical systems technology

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