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2004
DOI: 10.1063/1.1711187
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Micromachined ultrasonic droplet generator based on a liquid horn structure

Abstract: A micromachined ultrasonic droplet generator is developed and demonstrated for drop-on-demand fluid atomization. The droplet generator comprises a bulk ceramic piezoelectric transducer for ultrasound generation, a reservoir for the ejection fluid, and a silicon micromachined liquid horn structure as the nozzle. The nozzles are formed using a simple batch microfabrication process that involves wet etching of (100) silicon in potassium hydroxide solution. Device operation is demonstrated by droplet ejection of w… Show more

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Cited by 44 publications
(35 citation statements)
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“…Continued efforts to model and simulate droplet and ion transport in the air amplifier will enable improved designs and device implementation to further enhance ion transmission efficiency and lower limits of detection. The improvements shown in this work for standard ESI-MS should be also of great value to other emerging ambient ionization techniques such as DESI [21,22], MALDESI [23,24], and AMUSE [25,26].…”
Section: Resultsmentioning
confidence: 99%
“…Continued efforts to model and simulate droplet and ion transport in the air amplifier will enable improved designs and device implementation to further enhance ion transmission efficiency and lower limits of detection. The improvements shown in this work for standard ESI-MS should be also of great value to other emerging ambient ionization techniques such as DESI [21,22], MALDESI [23,24], and AMUSE [25,26].…”
Section: Resultsmentioning
confidence: 99%
“…[15][16][17] One of the vibrators, an ultrasonic, can generate typical size of droplets. 18,19 However, the task of rapidly generating droplets in cell structures is not easy.…”
Section: -5mentioning
confidence: 99%
“…Details of the device operation and microfabrication processes are described elsewhere. 33 Characterization of the droplet formation and ejection physics, using stroboscopic visualization and scaling analysis has previously been conducted. 34 Finally, the AMUSE has recently been demonstrated as a "soft" ion source for bioanalytical mass spectrometry, 15,20,21 including investigations into charge separation 18 and droplet charging under static and dynamic electric fields.…”
Section: Experimental Charge Measurementsmentioning
confidence: 99%
“…33,34 Again, an electric field in the region of droplet pinch-off is used to control the transport of charge into a forming droplet. 17,18 In these applications, precise control over droplet charging is imperative.…”
Section: Introductionmentioning
confidence: 99%