Abstract. Sensor's sensitivity dependence for samples based on ZnO thin film, micro-and nanostructures on their active area was investigated under the influence of ethanol, ammonia and acetone vapors. The impact of the morphology type and the size effects on the main characteristics of the ZnO resistive sensor elements was studied. For the first time the nanostructures of ZnO with a p-type conductivity have been fabricated by electrodeposition in the water solution.