Micromachined thermal accelerometer

Mailly, F.; Giani, Alain; Martinêz, Alexandre Souto; Bonnot, R.; Temple‐Boyer, Pierre; Boyer, Alexandre

doi:10.1016/s0924-4247(02)00428-4

Cited by 112 publications

(54 citation statements)

References 11 publications

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“…Nevertheless, the existence of the solid proof mass in the accelerometers brings some disadvantages, such as low shock survival rating and a complex fabrication process. Thermal accelerometer is a good alternative to solve the former problem since it works on thermal convection with no moving parts, except the gas used and contained in the micromachined cavity [2][3][4][5]. Figure 1 shows the principles of the sensor principle and a brief description of this is described here.…”

Section: Open Accessmentioning

confidence: 99%

“…Under the influence of an acceleration Γ, the temperature profile shifts and the balance is modified creating a temperature difference on the detectors equal to δT, proportional to the applied acceleration, giving an equivalent sensitivity G = δT/Γ (°C/g). All studies previously done [5,6] on this kind of sensor have allowed understanding the evolution of sensitivity in relation to some parameters, such as the cavity volume, the detectors geometrical design or the gas nature, but very few of them have been done on the dynamic behavior. Leung and coworkers have measured a −3 dB bandwidth of 20 Hz with a classical configuration of a cavity filled with gas [3].…”

Section: Open Accessmentioning

confidence: 99%

“…Detector width is chosen from 2 μm to 50 μm. Details of the fabrication steps have already been described in [5] and are succinctly described here. The thin-film platinum heater is 100 μm wide.…”

Section: Open Accessmentioning

confidence: 99%

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Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

et al. 2011

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Abstract:In the present work, the design and the environmental conditions of a micromachined thermal accelerometer, based on convection effect, are discussed and studied in order to understand the behavior of the frequency response evolution of the sensor. It has been theoretically and experimentally studied with different detector widths, pressure and gas nature. Although this type of sensor has already been intensively examined, little information concerning the frequency response modeling is currently available and very few experimental results about the frequency response are reported in the literature. In some particular conditions, our measurements show a cut-off frequency at −3 dB greater than 200 Hz. By using simple cylindrical and planar models of the thermal accelerometer and an equivalent electrical circuit, a good agreement with the experimental results has been demonstrated.

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Section: Open Accessmentioning

confidence: 99%

Section: Open Accessmentioning

confidence: 99%

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Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

et al. 2011

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“…To improve the electromagnetic interaction with the fractal, SG antennas of the same size were built on a SiN x thin film of about 1 µm thickness obtained by removing the Si substrate by wet chemical etching from the backside [16]. Etched area is about 5x5 mm 2 within which the SG pattern has been centered.…”

Section: Thz Fractal Antenna Characterizationmentioning

confidence: 99%

THz fractal antennas for electrical and optical semiconductor emitters and receptors

Gaubert

Chusseau

Giani

et al. 2004

phys. stat. sol. (c)

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THz waves have recently attracted considerable interest mainly because of their various applications. Efficient and compact CW sources are currently under development. Their optimization requires the most efficient coupling of THz radiation from the intrinsic inner semiconductor source to the outside world. In terms of compactness and planarity, this is best achieved using antennas that are fabricated using common processes in semiconductor technology. Although most antennas are narrow band devices, wide bands are expected from fractal 2D geometries like the Sierpinski gasket. Original results are presented on the design, fabrication and THz transmission of 2D metallic fractal deposited on highly resistive GaAs substrate as well as on thin SiNx membranes. Experimental transmission measurements are compared to theory.

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“…Thermal accelerometers detect acceleration by sensing the change in temperature of the sensing elements owing to heated moving fluid. (4,5) In general, they consume more power and have a lower response speed. Piezoresisitve accelerometers detect the acceleration by sensing the resistance change caused by the structural deformation attributable to external acceleration.…”

Section: Introductionmentioning

confidence: 99%

A Three-Axis Single-Proof-Mass CMOS-MEMS Piezoresistive Accelerometer with Frequency Outp

2014

Sensors and Materials

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Accelerometers have been used in a wide range of applications such as automobiles, mobile phones, and game controllers. In this paper, we present a monolithic complementary metal-oxide-semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with frequency output. The output oscillation frequency can be converted to a digital code by using a counter so that the sensor can be easily integrated with digital signal processing units on the same chip. The accelerometer is composed of a single proof mass suspended by four suspension beams. Polysilicon piezoresistors are placed at the ends of the beams to sense the displacement of the proof mass. The piezoresistors are used in RC oscillators whose oscillation frequencies vary owing to the change in resistance upon application of an external acceleration. Acceleration components in three axes can be obtained by the proper combination of signals from the piezoresistors at different locations. The accelerometer was fabricated by standard CMOS processes followed by backside and frontside dry etching postprocessing. The measured mechanical resonant frequency is 464 Hz. The oscillation frequency of the z-axis oscillator is about 70 MHz. The measured absolute sensitivity, relative sensitivity, and resolution along the z-axis are 198 kHz/g, 2.8×10 −3 ∆f/f 0 /g, and 10.9 mG/ Hz , respectively, for a sampling rate of 400 Hz and acceleration of 6 g at 27 Hz.

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Micromachined thermal accelerometer

Cited by 112 publications

References 11 publications

Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

THz fractal antennas for electrical and optical semiconductor emitters and receptors

A Three-Axis Single-Proof-Mass CMOS-MEMS Piezoresistive Accelerometer with Frequency Outp

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