Micromachined terahertz waveguide band-pass filters

Hu, Jian; Liu, Shuang; Zhang, Yong; Xu, Ruimin

doi:10.1109/mwsym.2017.8058653

Cited by 8 publications

(3 citation statements)

References 8 publications

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“…100 to 300 GHz) MPRWG BPFs reported in the open literature employ highaccuracy micromachining technologies, achieving close agreement with design specifications. Examples include CNC milling [40] and laser micromachining [41] at W-band, SU8 micromachining at J-band [42] and deep reactive-ion etching (DRIE) at WM-250 [43]. A full literature review of micromachined sub-THz COTS MPRWG BPFs has already been published [9].…”

Section: Bandpass Filtersmentioning

confidence: 99%

Polymer-Based 3-D Printed 140 to 220 GHz Metal Waveguide Thru Lines, Twist and Filters

et al. 2023

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This paper demonstrates the current state-of-the-art in low-cost, low loss ruggedized polymer-based 3-D printed G-band (140 to 220 GHz) metal-pipe rectangular waveguide (MPRWG) components. From a unique and exhaustive up-to-date literature review, the main limitations for G-band split-block MPRWGs are identified as electromagnetic (EM) radiation leakage, assembly part alignment and manufacturing accuracy. To mitigate against leakage and misalignment, we investigate a 'trough-and-lid' split-block solution. This approach is successfully employed in proof-of-concept thru lines, and in the first polymer-based 3-D printed 90° twist and symmetrical diaphragm inductive iris-coupled bandpass filters (BPFs) operating above 110 GHz. An inexpensive desktop masked stereolithography apparatus 3-D printer and a commercial copper electroplating service are used. Surface roughness losses are calculated and applied to EM (re-)simulations, using two modifications of the Hemispherical model. The 7.4 mm thru line exhibits a measured average dissipative attenuation of only 12.7 dB/m, with rectangular-to-trapezoidal cross-sectional distortion being the main contributor to loss. The 90° twist exhibits commensurate measured performance to its commercial counterpart, despite the much lower manufacturing costs. A detailed time-domain reflectometry analysis of flange quality for the thru lines and 90° twists has also been included. Finally, a new systematic iris corner rounding compensation technique, to correct passband frequency down-shifting is applied to two BPFs. Here, the 175 GHz exemplar exhibits only 0.5% center frequency up-shifting. The trough-and-lid assembly is now a viable solution for new upper-mm-wave MPRWG components. With this technology becoming less expensive and more accurate, higher frequencies and/or more demanding specifications can be implemented.

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Section: Bandpass Filtersmentioning

confidence: 99%

Polymer-Based 3-D Printed 140 to 220 GHz Metal Waveguide Thru Lines, Twist and Filters

et al. 2023

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“…The design of resonators with high unloaded quality factors QU at THz frequencies remains a challenging problem. Several waveguide filters in the WM-380 (WR-1.5) band (500-750 GHz) fabricated by micromachining have been reported in [1][2][3][4]; these filters used TE101 resonators and exhibited low QU. The losses in micromachined waveguide cavities can be reduced by advanced fabrication methods improving surface roughness and quality of metallization; these approaches require extensive development effort and cost.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Bandpass Filters with Enhanced Stopband Performance and Q-factor of 950 at 700 GHz

Glubokov

Zhao

Campion

et al. 2021

2021 IEEE MTT-S International Microwave Symposium (IMS)

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In this paper, we present two bandpass filters at 687.5 and 700 GHz with fractional bandwidths (FBW) of 3.64% and 1% respectively. Both 4 th -order all-pole filters utilize a pair of dual-mode cavities: the first filter uses elliptic cavities with quasi-TM110 degenerate modes, while the second one uses rectangular cavities with TM410-TM140 modes. In the latter, the coupling slots between the cavities are arranged to enhance the stopband performance by suppressing spurious resonances in the stopband. The filters are fabricated using silicon micromachining with gold metallization. The measured average insertion loss in the passband of the 3.64% FBW filter is 1.45 dB, and 2.5 dB for the 1% FBW filter. The experimentally extracted unloaded qualityfactors are 450 for the elliptic cavities and 950 for the rectangular cavities. The measured filter performance of the first prototypes agrees very well with the simulation results, exhibiting a frequency shift of less than 0.7%. These are the best insertion loss and quality factors ever published in this frequency range for narrow-band filters, and the first time that a 1%-FBW microwave filter is demonstrated above 500 GHz.

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“…Apart from CNC milling, several photolithography-based micromachining technologies have been reported to be capable of not only producing 3-D structures with high accuracy and large aspect ratio but also of facilitating large-scale inexpensive fabrication. These techniques include silicon deep reactive ion etching (Si-DRIE) [10], [11], LIthographie, Galvanoformung and Abformung (LIGA) [12], metal electroforming [13], [14], and SU-8 photoresist technology [15]- [20]. A wide range of passive devices, with excellent performance, have been demonstrated using these micromachining techniques [19].…”

Section: Introductionmentioning

confidence: 99%

A 135–150-GHz Frequency Tripler Using SU-8 Micromachined WR-5 Waveguides

Guo

Huggard

Dhayalan

et al. 2020

IEEE Trans. Microwave Theory Techn.

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This article presents a 135-150-GHz Schottky diode-based bias-less frequency tripler based on SU-8 micromachined WR-5 waveguides. The waveguides consist of five 432-µmthick silver-plated SU-8 layers, which house the diode chip and form the output matching network. The input matching circuit is realized in a computer numerical control (CNC) milled waveguide filter, which also provides support and thermal sink to the SU-8 waveguides. Considering the low thermal conductivity of the SU-8 material, auxiliary metallic thermal paths are designed, and the impact of these is discussed through thermal modeling. The thermal simulations show that under 50-mW power dissipation in the diode anodes, the maximum temperature of the SU-8 tripler is predicted to be 346 K at the diode junction, only 7 K higher than in an entirely metal equivalent. The tripler was measured to have a conversion loss of 16-18 dB and the input return loss is better than 18 dB. This work demonstrates that SU-8 micromachined waveguides can be used to package high-frequency semiconductor components, which, like other photolithography-based processes such as silicon deep reactive ion etching (Si-DRIE), has the potential for submicrometer feature resolution.

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Micromachined terahertz waveguide band-pass filters

Cited by 8 publications

References 8 publications

Polymer-Based 3-D Printed 140 to 220 GHz Metal Waveguide Thru Lines, Twist and Filters

Polymer-Based 3-D Printed 140 to 220 GHz Metal Waveguide Thru Lines, Twist and Filters

Micromachined Bandpass Filters with Enhanced Stopband Performance and Q-factor of 950 at 700 GHz

A 135–150-GHz Frequency Tripler Using SU-8 Micromachined WR-5 Waveguides

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