2015
DOI: 10.3390/mi6070879
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Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices

Abstract: Shape memory alloys (SMAs) are a class of smart materials characterized by shape memory effect and pseudo-elastic behavior. They have the capability to retain their original form when subjected to certain stimuli, such as heat or a magnetic field. These unique properties have attracted many researchers to seek their application in various fields including transportation, aerospace, and biomedical. The ease process adaption from semiconductor manufacturing technology provides many opportunities for designing mi… Show more

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Cited by 66 publications
(22 citation statements)
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“…The other performance related advantages of SMPs come from their biocompatibility, implantable structure and tunable actuation using the glass transition temperature [62]. The super-coiled nylon based SMP actuators have a very encouraging performance when they are used in filament state.…”
Section: Operation Range Of Smpsmentioning
confidence: 99%
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“…The other performance related advantages of SMPs come from their biocompatibility, implantable structure and tunable actuation using the glass transition temperature [62]. The super-coiled nylon based SMP actuators have a very encouraging performance when they are used in filament state.…”
Section: Operation Range Of Smpsmentioning
confidence: 99%
“…It is not uncommon to have SMAs as actuators in aerospace applications for shape-morphing of aero-foils [64] or for the simplification and compactness of UAV actuation [65]. The super-elasticity and shape memory property of SMAs also make them an excellent actuator choice for biomedical applications [62]. Although being not a conventional mechanical application, SMAs can also be used in small-scale thermal engines and pumps [56].…”
Section: Modality Of Operationmentioning
confidence: 99%
“…With the growth of semiconductor and precision manufacturing industries, the positioning accuracy of micro/nano scale is highly required [1][2][3][4]. Because of the advantages of fast frequency response, high stiffness and displacement resolution, piezoelectric actuators (PEAs) based on inverse piezoelectric effect have gradually become one of the most widely used smart material actuators.…”
Section: Introductionmentioning
confidence: 99%
“…Ni-Ti based shape memory alloys (SMA) are one such difficult-to-machine material with applications in numerous fields (automobile actuators, biomedical, aerospace, micro-electromechancial systems, etc.) [12,13]. These alloys possess the unique properties of pseudo-elasticity, bio-compatibility, corrosion resistance and shape memory effect.…”
Section: Introductionmentioning
confidence: 99%