Micromachined mass sensor based on film bulk acoustic resonator

Feng, Yanlu; Liu, Mengwei; Li, Xin; Li, Jian

doi:10.1109/spawda.2015.7364478

2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) 2015

DOI: 10.1109/spawda.2015.7364478

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Micromachined mass sensor based on film bulk acoustic resonator

Yanlu Feng

Mengwei Liu

Xin Li

et al.

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Micromachined mass sensor based on film bulk acoustic resonator

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References 6 publications

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