Micromachined inclinometer with high sensitivity and very good stability

Plasma techniques in the production of customized MEMS‐applications

“…First measurements of a dual axis inclination sensor prototype have been reported at MEMS-01. [25] This two-dimensional sensor exhibits an astonishingly high angular resolution of 0.007°.…”

Electrostatic Capacity Type Micro Inclination Sensor Utilizing Dielectric Nano-Particles

“…Currently, it is reported that gyro sensors and acceleration sensors manufactured using microelectromechanical system (MEMS) technologies are used as inclination sensors. [1][2][3] Such sensors, however, cannot produce linear output with respect to inclination. The difficulty in manufacturing their complex structures is a problem.…”

Design of a Thermal-Bubble-Based Micromachined Accelerometer

“…It is expected that further improvement on the frequency response of the accelerometer can be achieved by optimizing the device structure. In comparison, the response time of the accelerometer filled up with SF 6 in [6] is 600 ms. Compared to the convection-based accelerometers, the proposed thermal-bubble-based accelerometer has higher sensitivity and faster frequency response due to its property of quite clear interface between the high temperature-induced thermal-bubble and the working liquid, providing good thermal conduction and higher density.…”

“…The advantages for this kind of sensors are compact, lightweight, sensitive to small accelerations, and inexpensive to manufacture. Therefore, numerous thermal convection-based micro accelerometers have been presented in the literatures [3]- [6] over the last few years. However, the heat and flow transfer in the gas media are relatively slower than that in the other media, e. g., liquid media.…”