Micromachined High Frequency 1–3 Piezocomposite Transducer Using Picosecond Laser

Xu, Jie; Han, Zhile; Wang, Ninghao; Li, Zhangjian; Lv, Jiabing; Zhu, Xi; Cui, Yaoyao; Jian, Xiaohua

doi:10.1109/tuffc.2021.3059942

Cited by 17 publications

(6 citation statements)

References 23 publications

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“…The thickness of the piezoelectric material, t = v/2 f in designed frequency is usually determined by the acoustic velocity of the piezoelectric material, v, and the central frequency, f. Traditional fabrication methods for HF piezoelectric materials include the dicing-and-filling method, the sol-gel method, laser etching, and dry etching. [75][76][77][78][79] After which, the ultrasound transducer is assembled and utilized for various applications. Currently, Pb-based piezoelectrics are the dominant material for the fabrication of transducers, owing to their excellent piezoelectric properties (d 33 > 500 pCN −1 , k t > 50%).…”

Section: High Frequency Lead-free Ultrasound Transducermentioning

confidence: 99%

Advances in development of Pb-free piezoelectric materials for transducer applications

Safari

Zhou

Zeng

et al. 2023

Jpn. J. Appl. Phys.

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Pb-based ferroelectrics and piezoelectrics in the form of bulk polycrystalline, textured ceramics, single crystals, and composites, have been used in sensors, actuators, and other electromechanical devices. However, the toxicity of these materials has been a major concern around the globe for the past few decades. The report of high piezoelectric activity in the BaTiO3 (BT), (Bi0.5Na0.5)TiO3 (BNT), and (K0.5,Na0.5)NbO3 (KNN) and binary and ternary systems with other compounds have given hopes for alternatives to Pb-based materials. Recent modifications of KNN-based compositions with BaZrO3 in combination with (Bi0.5,K0.5)Hf O3 result in excellent electromechanical properties. Therefore, increased research in Pb-free materials brings hope for practical applications close to reality. In this review article, the recent developments on BT, BNT, and KNN-based soft and hard Pb-free piezoelectric compositions with a range of electromechanical properties for transducer applications will be reviewed. Several examples in the development of lead-free high-frequency ultrasound transducers will be presented.

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Section: High Frequency Lead-free Ultrasound Transducermentioning

confidence: 99%

Advances in development of Pb-free piezoelectric materials for transducer applications

Safari

Zhou

Zeng

et al. 2023

Jpn. J. Appl. Phys.

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“…Since the pulse width of picosecond laser is shorter than the thermal relaxation time, the cold ablation process can be used to remove thin material layers without significant thermal sideeffects [100]. Xu et al [101]…”

Section: Piezo-composite Micromachined Ultrasound Transducer (Pc-mut)mentioning

confidence: 99%

Recent Advances in Transducers for Intravascular Ultrasound (IVUS) Imaging

Peng

Kim

et al. 2021

Sensors

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As a well-known medical imaging methodology, intravascular ultrasound (IVUS) imaging plays a critical role in diagnosis, treatment guidance and post-treatment assessment of coronary artery diseases. By cannulating a miniature ultrasound transducer mounted catheter into an artery, the vessel lumen opening, vessel wall morphology and other associated blood and vessel properties can be precisely assessed in IVUS imaging. Ultrasound transducer, as the key component of an IVUS system, is critical in determining the IVUS imaging performance. In recent years, a wide range of achievements in ultrasound transducers have been reported for IVUS imaging applications. Herein, a comprehensive review is given on recent advances in ultrasound transducers for IVUS imaging. Firstly, a fundamental understanding of IVUS imaging principle, evaluation parameters and IVUS catheter are summarized. Secondly, three different types of ultrasound transducers (piezoelectric ultrasound transducer, piezoelectric micromachined ultrasound transducer and capacitive micromachined ultrasound transducer) for IVUS imaging are presented. Particularly, the recent advances in piezoelectric ultrasound transducer for IVUS imaging are extensively examined according to their different working mechanisms, configurations and materials adopted. Thirdly, IVUS-based multimodality intravascular imaging of atherosclerotic plaque is discussed. Finally, summary and perspectives on the future studies are highlighted for IVUS imaging applications.

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“…1-3 Piezoelectric composites have been widely used in underwater sonar, nondestructive testing, and medical ultrasound diagnosis because of their superior properties to bulk piezoelectric materials. − The low-density polymer doped with three-dimensional connectivity reduces the transverse vibration, , which improves the electromechanical coupling coefficient k t to obtain higher energy conversion efficiency and reduces the acoustic impedance to match the medium such as water or human organization. , High-performance piezoelectric materials and new structures were the main research keys of 1-3 piezoelectric composites in the field of underwater acoustic in recent years. As an active material, piezoelectric ceramics and piezoelectric single crystals are the main representatives of high-performance piezoelectric materials.…”

Section: Introductionmentioning

confidence: 99%

Flexible 1-3 Piezoelectric Composites with Soft Embedded Conductive Interconnects for Underwater Acoustic Transducers

Hao

Zhong

Zhang

et al. 2023

ACS Appl. Electron. Mater.

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1-3 Piezoelectric composites have been widely used in underwater acoustic transducers because of their advanced electromechanical coupling properties relative to bulk piezoelectric ceramics. However, the existing applied composites are mainly rigid 1-3 PZT–epoxy resin composites, which have rigid structures and cannot be adapted to various sonar carriers with complex surfaces. Here, we design and develop a flexible 1-3 PZT–silicone rubber composite (PSC) for the first time. PSC combines a soft silicone rubber polymer in PZT with flexible embedded island-bridge conductive interconnects to enable the flexibility of both the piezoelectric sensing core and the electrical layer. The flexible wide bridge structure embedded in the polymer can cope with the large bending deformation of PSC with good conductive property, while the rigid thin island structure ensures the high acoustic performance of piezoelectric materials. A PSC sample is prepared with its structural parameters optimized via finite element analysis and is experimentally verified to have good flexibility, high electromechanical coupling coefficient (k t = 0.7), great thermal stability (from 25 to 105 °C), and bending stability (bending angle up to 215°). In addition, a preparation method for flexible 1-3 PSC is introduced, which has the advantages of high efficiency, low cost, no sample size restriction, and no high-temperature operation. The flexible 1-3 PSC in this work paves an important way for the development and application of the next generation of flexible underwater acoustic transducers.

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Micromachined High Frequency 1–3 Piezocomposite Transducer Using Picosecond Laser

Cited by 17 publications

References 23 publications

Advances in development of Pb-free piezoelectric materials for transducer applications

Advances in development of Pb-free piezoelectric materials for transducer applications

Recent Advances in Transducers for Intravascular Ultrasound (IVUS) Imaging

Flexible 1-3 Piezoelectric Composites with Soft Embedded Conductive Interconnects for Underwater Acoustic Transducers

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