2016
DOI: 10.1016/j.proeng.2016.11.344
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Micromachined Gas Sensors Based on Au-functionalized SnO 2 Nanorods Directly Integrated without Catalyst Seeds via AA-CVD

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Cited by 8 publications
(3 citation statements)
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“…This temperature was quite low compared to the operating temperatures of metal oxides and many TMD based gas sensors, which is advantageous for the long term stability of gas sensitive nanomaterials. [54][55][56][57] Fig. 8 displays sensor resistance changes as a function of time, towards four replicates of 10 ppm of ammonia (Fig.…”
Section: Gas Sensing Resultsmentioning
confidence: 99%
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“…This temperature was quite low compared to the operating temperatures of metal oxides and many TMD based gas sensors, which is advantageous for the long term stability of gas sensitive nanomaterials. [54][55][56][57] Fig. 8 displays sensor resistance changes as a function of time, towards four replicates of 10 ppm of ammonia (Fig.…”
Section: Gas Sensing Resultsmentioning
confidence: 99%
“…This temperature was quite low compared to the operating temperatures of metal oxides and many TMD based gas sensors, which is advantageous for the long term stability of gas sensitive nanomaterials. 54–57…”
Section: Resultsmentioning
confidence: 99%
“…Tin dioxide is an n-type semiconductor with a wide band gap of 3.6 eV. It is one of the best known gas sensing materials that shows excellent chemical stability and a remarkable sensitivity to a wide spectrum of gases and vapors [ 28 , 29 ]. In this work, SnO 2 films of 50 nm were successfully deposited via reactive radio frequency (RF) magnetron sputtering over the microsensor platforms.…”
Section: Resultsmentioning
confidence: 99%