Micromachined aperture probe tip for multifunctional scanning probe microscopy

Abraham, Michaël; Ehrfeld, W.; Lacher, M.; Mayr, Karsten; Noell, Wilfried; Güthner, Peter; Barenz, Joachim

doi:10.1016/s0304-3991(97)00114-9

Cited by 27 publications

(16 citation statements)

References 10 publications

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“…Thus, the aperture tip may be fabricated in a reliable batch process, which has the potential for implementation of new monolithically integrated architectures for scanning probe microscopy. Abraham et al [22] proposed a micromachined probe where the SNOM tips were first micromachined onto a silicon membrane, made of silicon nitride Si N on a silicon wafer. This membrane was placed into a specific microassembly setup, where 80-m thin and cleaved optical fiber was aligned and glued with its core right underneath the tip basis, as shown in Fig.…”

Section: Micromachined Nanoscale Scanning Optical Microscope (Snmentioning

confidence: 99%

The role of silicon micromachining in optical fiber sensing technologies

Gorecki

Labachelerie²,

Thiéry³

2003

IEEE Sensors J.

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Silicon micromachining has the advantage of small scale and easy integration with electronic circuits and sensors, resulting in the production of miniaturized and smart microsystems with moving parts. The size of the microelectromechanical systems/microoptoelectromechanical systems devices is immediately compatible with the size of integrated optics (IOs), and is appropriate to control or manipulate optical radiations. This technology is, therefore, suitable to fabricate precision-defined optical components and offers relatively easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis on sensors with micromachined IO structures, nanoscale scanning optical microscope sensors, and fiber IO circuits coupling systems.

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Section: Micromachined Nanoscale Scanning Optical Microscope (Snmentioning

confidence: 99%

The role of silicon micromachining in optical fiber sensing technologies

Gorecki

Labachelerie²,

Thiéry³

2003

IEEE Sensors J.

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“…25 However, this technique can only be applied to very minor topography in the 10 nm range. Far-field apertured tips have been fabricated 26,27 that are sharp and avoid close contact of the metal coating with the surface. Their aperture sizes are rather large, but useful photolithographic properties remain.…”

Section: Artifacts In Snom On Rough Surfacesmentioning

confidence: 99%

Artifacts in scanning near-field optical microscopy (SNOM) due to deficient tips

Kaupp

Herrmann

Haak

1999

J. Phys. Org. Chem.

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Apertureless scanning near-field optical microscopy (SNOM) in the reflection-back-to-the-fiber configuration is possible on rough surfaces of practical importance and reaches 15 nm lateral resolution. The feedback for constant distance mode is provided by shear-force atomic force microscopy. Any artifacts in the atomic force microscopy will translate into artificial optical responses. Very sharp tapered tips (radius ca. 15 nm, apex angle`10°) are required. Only these give the strongly enhanced reflectance in shear-force distance, do not break as easily as do more blunt tips, and can follow the topography in order to provide chemical SNOM contrast without topographic errors. In the absence of significant reflectance enhancement, if blunt or abrased or broken tips are used, not SNOM but artificial 'optical contrast' is recorded. Metal-coated tips are unsuitable: they become hot, give poor resolution and are the source of numerous additional artifacts that are summarized for comparison. The SNOM artifacts are subdivided into:* topographic errors-if chemical uniform topography does give some optical response; * lack of spatial correlation-if the optical signal does not reproduce the site of the emitter or of the chemical contrast; * tip imaging-very large features and more or less negative differentials therefrom; * contrast inversion-false sign of optical contrast; * split optical contrast-signal is split into two unequal parts with the same (false) sign of the contrast; * artificial stripes-instead of chemical/emissive contrast artificial stripes, that are not always 'interference fringes' or 'edge-contrast'.The artifacts can be easily recognized in published images from different techniques and modes of SNOM. Their analysis would be facilitated if full x/y/z data were published instead of two-dimensional images. We therefore disclose interactively analyzable VRML data in the EPOC version.

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“…MEMS-based SNOM probes are usually cantilever-shaped, and the probe tip is positioned at the end of the cantilever. [8][9][10][11][12] Although previous studies on MEMS-based SNOM probes have mainly focused on scattering-based schemes, we used a fluorescent material scheme in our research.…”

Section: Introductionmentioning

confidence: 99%

Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning

Kan

Matsumoto

Shimoyama

2007

Review of Scientific Instruments

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Scanning near-field optical microscopes (SNOMs) with fluorescence-based probes are promising tools for evaluating the optical characteristics of nanoaperture devices used for biological investigations, and this article reports on the development of a microfabricated fluorescence-based SNOM probe with a piezoresistor. The piezoresistor was built into a two-legged root of a 160-microm-long cantilever. To improve the displacement sensitivity of the cantilever, the piezoresistor's doped area was shallowly formed on the cantilever surface. A fluorescent bead, 500 nm in diameter, was attached to the bottom of the cantilever end as a light-intensity-sensitive material in the visible-light range. The surface of the scanned sample was simply detected by the probe's end being displaced by contact with the sample. Measuring displacements piezoresistively is advantageous because it eliminates the noise arising from the use of the optical-lever method and is free of any disturbance in the absorption or the emission spectrum of the fluorescent material at the probe tip. The displacement sensitivity was estimated to be 6.1 x 10(-6) nm(-1), and the minimum measurable displacement was small enough for near-field measurement. This probe enabled clear scanning images of the light field near a 300 x 300 nm(2) aperture to be obtained in the near-field region where the tip-sample distance is much shorter than the light wavelength. This scanning result indicates that the piezoresistive way of tip-sample distance regulation is effective for characterizing nanoaperture optical devices.

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Micromachined aperture probe tip for multifunctional scanning probe microscopy

Cited by 27 publications

References 10 publications

The role of silicon micromachining in optical fiber sensing technologies

The role of silicon micromachining in optical fiber sensing technologies

Artifacts in scanning near-field optical microscopy (SNOM) due to deficient tips

Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning

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