Microlens lithography and smart masks

Völkel, R.; Herzig, Hans Peter; Nussbaum, Ph.; Blattner, Peter; Dändliker, R.; Cullmann, E.; Hugle, W.B.

doi:10.1016/s0167-9317(96)00199-2

Cited by 17 publications

(12 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Smart mask lithography [35] is aimed at the printing of simple patterns, such as a matrix of micro-dots, posts or holes, or other patterns consisting of lines, dots, circles or squares. A smart mask consists of one (or more) layer(s) of micro-optical elements, such as refractive or diffractive microlenses (spherical, cylindrical or elliptical shape), gratings, CGH, apertures, etc.…”

Section: Smart Mask Lithographymentioning

confidence: 99%

Design, fabrication and testing of microlens arrays for sensors and microsystems

et al. 1997

View full text Add to dashboard Cite

show abstract

Section: Smart Mask Lithographymentioning

confidence: 99%

Design, fabrication and testing of microlens arrays for sensors and microsystems

et al. 1997

View full text Add to dashboard Cite

show abstract

“…There are some basic imaging optical systems that can form a real image, such as convex lens, a concave mirror, and diffraction optics (a Fresnel lens). [2] For example, there are systems that are based on the lens array of the Graded Index Lens (GRIN) [3], Roof Mirror Lens Array (RMLA) [4], and the stacking of various micro-lens arrays [5,6].These systems with the lens have an optical axis and a specific focal length. Moving an object closer to the optics, the real image forms farther from it and is magnified.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and evaluation of Dihedral Corner Reflector Array for floating image manufactured by synchrotron radiation

Yamane

Maekawa

Utsumi

et al. 2015

2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC)

View full text Add to dashboard Cite

We propose a new imaging optics called Dihedral Corner Reflector Array (DCRA) which is designed to make the floating image. DCRA consists of numerous micro-mirrors placed perpendicular to the surface of substrate. The micro-mirror array is implemented by the inner walls of minute square holes or the side of minute square pillar. We can choose two types of the structure. The primordial is based on two reflections by a pair of adjacent mutually perpendicular mirrors, i.e., a dihedral corner reflector. Although the principal of operation is based on reflection by mirrors, the device is also transmissive and deflects light. Primordial of DCRA is not so complicated, However, it is too difficult to fabricate the DCRA by usual machining because of high aspect ratio micromachining and high mirror accuracy. Therefore, in this manuscript, we fabricated the device by deep X-ray lithography due to synchrotron radiation. The characteristics of the fabricated DCRA are evaluated by the optical transmission and reflection measurements.

show abstract

“…Microlenses, and especially microlens arrays, find applications in different fields such as: optical communication [1], imaging [2] or astronomy [3]. Several production methods for thin microlenses have been investigated, like electron beam writing on PMMA substrates [4], different methods of UV exposure of photoresist [5], deep proton irradiation of PMMA substrates [6], Reactive Ion Etching of silica [7], dispensing photoresist droplets [8] and direct hot embossing [9].…”

Section: Introductionmentioning

confidence: 99%