Microlens arrays of high-refractive-index glass fabricated by femtosecond laser lithography

Nishiyama, Hiroaki; Nishii, Junji; Mizoshiri, Mizue; Hirata, Yoshihiro

doi:10.1016/j.apsusc.2009.04.064

Cited by 34 publications

(26 citation statements)

References 21 publications

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“…On the other hand, semiconductor based micro lenses are typically fabricated using focused ion beam or pattern transfer from photoresist to semiconductor by wet or dry etching. [27][28][29][30][31][32][33][34][35] The refractive indices are matched but only low aspect ratio micro lenses are typically achieved. Although high aspect ratio GaAs hemispheres have been attempted, 36 no design rules or detailed processing steps have been published and the large volume production capability was unclear.…”

Section: Fabrication Resultsmentioning

confidence: 99%

Ultrahigh luminescence extraction via the monolithic integration of a light emitting active region with a semiconductor hemisphere

Ding

et al. 2011

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Investigation of surface plasmon coupling with the quantum well for reducing efficiency droop in GaN-based light emitting diodes J. Appl. Phys. 114, 113104 (2013) A light emitting active region with three InGaAs quantum wells is monolithically integrated with a GaAs hemisphere as a means to increase the extraction efficiency of light emitting diodes. For a device with a small active region and large hemisphere and optimal antireflection, theoretical calculations show that the extracted fraction of spontaneous emission incident on the hemisphere is greater than 99.9% and the overall extraction efficiency of the integrated device is as high as 90%.The hemisphere is fabricated with a consistent aspect ratio ͑height versus width͒ using photoresist reflow and inductive coupled plasma etching. Detailed numerical simulations are performed to predict the reflow and dry etch processes as an aid to device fabrication. The fabrication results show that near perfect GaAs hemispheres can be successfully integrated with light emitting active regions and that the resulting light emitting diodes have the potential for mass production.

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Section: Fabrication Resultsmentioning

confidence: 99%

Ultrahigh luminescence extraction via the monolithic integration of a light emitting active region with a semiconductor hemisphere

Ding

et al. 2011

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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“…Microstructuring of glass using laser irradiation has become increasingly important for microsystems technologies, including micro-optics [1][2][3][4]. Scaling device dimensions down from millimeters to micrometers is relatively straightforward using glass micromachining [5,6].…”

Section: Introductionmentioning

confidence: 99%

Improvement of the optical and morphological properties of microlens arrays fabricated by laser using a sol–gel coating

Nieto

Gómez‐Varela

Martín

et al. 2015

Applied Surface Science

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“…A microlens is generally fabricated by various techniques such as wet plasma processing, focused ion beam (FIB) technology, wet etching and laser lithography. (18)(19)(20)(21) However, the profile of a microlens fabricated by these techniques is affected by factors such as etching resistance and reflow shape of the resist. To improve the reproducibility of the microlens profile, we examined the microlens fabrication process using vertical mesa structures formed on a quartz substrate.…”

Section: Prospect Of Combination With Optical Devices and Single-cellmentioning

confidence: 99%

Single-Cell Isolation and Size Sieving Using Microenclosure Array for Microbial Analysis

2015

Sensors and Materials

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We demonstrated a size sieving microbial cell separation apparatus consisting of multipillar microenclosures. The apparatus consists of two kinds of microenclosures that differ in size, namely, 4 × 4 μm 2 enclosures with 0.2 μm space between 1 μm diameter pillars and 8 × 8 μm 2 enclosures with 1 μm space. Single cells of Escherichia coli and Saccharomyces cerevisiae were separately captured in smaller and larger microenclosures, respectively, just by dropping mixtures. Moreover, we examined whether incubation using the microenclosure structure was possible or not, and succeeded in the incubation of S. cerevisiae. Microlens arrays using prefabricated mesa structures by the Ar plasma etching process were also manufactured. We believe that the fluorescence analysis or investigation of photochemical reactions for microbial single cells can be carried out by a combination of the microenclosure structure and optical devices.

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Microlens arrays of high-refractive-index glass fabricated by femtosecond laser lithography

Cited by 34 publications

References 21 publications

Ultrahigh luminescence extraction via the monolithic integration of a light emitting active region with a semiconductor hemisphere

Ultrahigh luminescence extraction via the monolithic integration of a light emitting active region with a semiconductor hemisphere

Improvement of the optical and morphological properties of microlens arrays fabricated by laser using a sol–gel coating

Single-Cell Isolation and Size Sieving Using Microenclosure Array for Microbial Analysis

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