Microfluidic Photomask Design Using CAD Software for Application in Lab-On-Chip Biomedical Nanodiagnostics

Abstract

Photomasks are used as stencil to print images on semiconductor material. This study represents design and specifications of photomask for microfluidic fabrication. For a precise pattern transfer, the photomask should meet with certain considerations such as critical dimension uniformity, resolution and alignment. This paper explains the design of microfluidics with three channels using AutoCAD software for lab-on-chip application. Total surface area of the device is 242.52mm2 in which the width and length is 12.00mm and 20.21mm respectively. The device was designed in particular size to meet its behavior as a disposable chip and increases the economic value when it is fabricated.

Fabricating the Microfluidic Chip With Length-and-Diameter Ratio of Channel Around 3000

“…The mould of straight or spiral channel structures for microfluidic fabrication were made of bakelite plastic covered with a 20 µm thickness of copper and zinc layers used in the electronic industry for reducing the manufacturing costs of mould [13,14]. Due to the fact that the thickness of the copper and zinc layer was only 20 µm thick, fabricated channels were still suitable with small volumetric fluid flow in µL.…”

A Microfluidic Platform for Precision Small-volume Sample Processing and Its Use to Size Separate Biological Particles with an Acoustic Microdevice

“…NOTE: General considerations and guidance for microfabrication process design and mask layout can be found in texts on microfabrication and tutorials of photomask design. [19][20][21] 1. Lay out Mask 1, the Fluidic Layer (front side), using appropriate CAD software.…”

Design and Fabrication of Polydimethylsiloxane Based Low Cost Microfluidic for Ultra-Fast Diagnostic Applications

“…The manipulation of surface properties ranging from hydrophobic to hydrophilic, charged or uncharged, smooth to rough, are important in defining biocompatibility [21]. In this paper we present a simple and inexpensive method to fabricate microfluidic based microchannels on oxide grown silicon wafer in order to achieve smooth and deep microchannels [23]. By using PDMS and SU-8 cast and peel method, the proposed design is fabricated under cleanroom environment.…”