Microfabrication of thin film temperature sensor for cryogenic measurement

Design, fabrication and test of an integrated multi-microchannel heat sink for electronics cooling

“…(1) to (3) to be (1.72 ± 0.45) × 10 −3 K −1 , 41% smaller than TCR for pure bulk Ru (4.2 × 10 −3 K −1 [15]). This value is lower than that found for the common Cr/Au thin film sensors (3.03 × 10 −3 K −1 [15]) and Pt thin film sensors (2.0 × 10 −3 K −1 [16]), meaning higher sensitivity to temperature variations.…”

Mixed-Lanthanoid Metal–Organic Framework for Ratiometric Cryogenic Temperature Sensing

“…With the development of aerospace, superconducting magnets, and nuclear fusion power research, the availability of thermometers for cryogenic temperatures has become more important. , Recently, several ratiometric thermometers based on lanthanoid metal–organic frameworks (MOFs) have been reported containing a mixture of lanthanide ions, mainly Eu III and Tb III . ,,− However, the lack of sensitivity at cryogenic temperatures limits their application. Extending the sensing temperature range to below 50 K is of great value for both cryogenic research and industrial applications, e.g., energy and space exploration.…”

Fiber-based temperature microsensor by using three-dimensional photomask

“…It is well known that the practical TCRs of the Pt film-based resistive temperature sensor are subjected to influences from film thickness, crystallization status, annealing, pattern width, and other parameters. [22][23][24][25][26][27][28][29][30] Han et al 28) had fabricated a temperature microsensor of a Pt film on an alumina substrate by using a sputtering method. Their sensor has the same pattern width of 10 µm and TCRs of about 0.0019-0.0022=°C.…”