Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance

Jinkui, 褚金奎 Chu; Zhao-peng, 陈兆鹏 Chen; Ran, 张然 Zhang

doi:10.3788/ope.20111912.2935

光学精密工程

2011

DOI: 10.3788/ope.20111912.2935

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Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance

褚金奎 Chu Jinkui¹,

陈兆鹏 Chen Zhao-peng²,

张然 Zhang Ran³

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Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance

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