Abstract:Micromagnets have wide applications in MEMS and micromotors but there are some limitations in current microfabrication processes for permanent magnets. A novel damage-free ultrashort pulsed laser machining process to manufacture complex shapes of Sm2Co17 micromagnets is proposed in this work. This process permits to cut the microparts submerged in a refrigerant fluid. This is especially beneficial for magnets, which are very sensitive to high temperature, as the heat effect of laser cutting on the hard magneti… Show more
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