Abstract:AFM probes consisting of a diamond cantilever and a diamond tip were fabricated using a newly developed micromachining process based on the CVD ofdiamond film. The tips were fabricated by diamond deposition onto a Si mold formed by anisotropic etching in a KOH solution. It was possible to realize a sharp diamond tip with an apex radius of less than several tens of nm. The cantilevers were fabricated by selective deposition of diamond film patterns. This process was realized by mechanically damaging the substra… Show more
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