2019
DOI: 10.18494/sam.2019.2235
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Microfabrication of Concave Micromirror for Microbial Cell Trapping Using K?hler Illumination by XeF2 Vapor Etching

Abstract: We demonstrated a Si-based concave micromirror array for cell trapping that was fabricated by XeF 2 vapor etching. We also examined the optical properties of the focal image of each concave micromirror. In addition, yeast cell trapping was realized at the focal point of a concave micromirror of approximately 35 μm diameter by Köhler illumination using a halogen lamp. The proposed process is useful for the microfabrication of various Si-based microstructure devices, such as microchannels and micro-electromechan… Show more

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Cited by 2 publications
(1 citation statement)
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“…The author is also involved in the development and experimentation of cell trapping at the focal spots of concave micromirrors as a device technology for controlling a single cell, as shown in figure 2 [2]. The concept behind this is the trapping of cells using a concave micromirror array under Köhler epi-illumination.…”
Section: Introductionmentioning
confidence: 99%
“…The author is also involved in the development and experimentation of cell trapping at the focal spots of concave micromirrors as a device technology for controlling a single cell, as shown in figure 2 [2]. The concept behind this is the trapping of cells using a concave micromirror array under Köhler epi-illumination.…”
Section: Introductionmentioning
confidence: 99%