Microfabrication Approaches on Magnetic Shape Memory Films
Satyakam Kar,
Kornelius Nielsch,
Sebastian Fähler
et al.
Abstract:Magnetic shape memory alloys are emerging multifunctional materials that enable applications like high‐stroke actuation, solid‐state refrigeration, and energy harvesting of waste heat. Thin films of these alloys promise integration in microsystems to exploit their multifunctional properties at the microscale. However, the microfabrication process of these Heusler alloys is difficult. Here, we investigate different etching techniques for the microfabrication of epitaxial Ni‐Mn‐Ga films, explain the encountered … Show more
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