Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra

Belmonte, Pablo Nunes Agra; Monteiro, Davies William de Lima; Costa, Rodolfo Felipe de Oliveira; French, P.J.; Pandraud, G.

doi:10.1117/12.2052527

Cited by 2 publications

(1 citation statement)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Microlens arrays could either be fabricated separately and bonded to back-illuminated KID arrays 64 or etched into the wafer frontside before or after KID fabrication. There are examples of silicon microlens fabrication in the literature that could achieve the micron-level tolerances required for operation down to 10 μm, [65][66][67][68][69][70][71] although those involving micromachining and laser etching would likely be too slow for arrays of 10 4 detectors. A promising approach is the deposition of Fresnel "zone plate" microlens arrays on the wafer frontsides, which have already been demonstrated at λ ¼ 10.6 μm for antenna coupling.…”

Section: Kinetic Inductance Detectors and Readout Electronicsmentioning

confidence: 99%

Galaxy Evolution Probe

Glenn

Bradford

Rosolowsky

et al. 2021

J. Astron. Telesc. Instrum. Syst.

View full text Add to dashboard Cite

The Galaxy Evolution Probe (GEP) is a concept for a mid-and far-infrared space observatory to measure key properties of large samples of galaxies with large and unbiased surveys. GEP will attempt to achieve zodiacal light and Galactic dust emission photon backgroundlimited observations by utilizing a 6-K, 2.0-m primary mirror and sensitive arrays of kinetic inductance detectors (KIDs). It will have two instrument modules: a 10 to 400 μm hyperspectral imager with spectral resolution R ¼ λ∕Δλ ≥ 8 (GEP-I) and a 24 to 193 μm, R ¼ 200 grating spectrometer (GEP-S). GEP-I surveys will identify star-forming galaxies via their thermal dust emission and simultaneously measure redshifts using polycyclic aromatic hydrocarbon emission lines. Galaxy luminosities derived from star formation and nuclear supermassive black hole accretion will be measured for each source, enabling the cosmic star formation history to be measured to much greater precision than previously possible. Using optically thin far-infrared fine-structure lines, surveys with GEP-S will measure the growth of metallicity in the hearts of galaxies over cosmic time and extraplanar gas will be mapped in spiral galaxies in the local universe to investigate feedback processes. The science case and mission architecture designed to meet the science requirements is described, and the KID and readout electronics state of the art and needed developments are described. This paper supersedes the GEP concept study report cited in it by providing new content, including: a summary of recent mid-infrared KID development, a discussion of microlens array fabrication for mid-infrared KIDs, and additional context for galaxy surveys. The reader interested in more technical details may want to consult the concept study report. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

show abstract