Microfabrication and characterization of a silicon-based millimeter scale, PEM fuel cell operating with hydrogen, methanol, or formic acid

Yeom, Junghoon; Mozsgai, G. Z.; Flachsbart, Bruce R.; Choban, Eric R.; Asthana, Amit; Shannon, Mark A.; Kenis, Paul J. A.

doi:10.1016/j.snb.2004.12.050

Cited by 106 publications

(50 citation statements)

References 21 publications

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“…Lee et al (2002) reported arrays of hydrogen-air PEM fuel cells formed on silicon substrates, wherein a reconfigurable cathode electrode enabled scaling of either current or voltage. An additional configuration has been reported to form the porous silicon or silicon dioxide catalyst/electrode support on the same side of the silicon wafer Meyers and Maynard (2002) 63 Hydrogen PEM, 258C Modroukas et al (2005) 130 Hydrogen PEM, 388C Yeom et al (2005) 35 Hydrogen PEM, 208C Yu et al (2003) 195 Hydrogen PEM, 258C Kelley et al (2002) 90 0.5 M CH 3 OH, DMFC, 708C Motokawa et al (2004) 0.78 2 M CH 3 OH, DMFC, 258C Yen et al (2003) 40 4 M CH 3 OH, DMFC, 258C Wosniak (2004) 0.3 6 M CH 3 OH, DMFC, 258C…”

Section: Miniaturization Methodsmentioning

confidence: 99%

Micro-fuel cell power sources

Morse

2007

Int. J. Energy Res.

168

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SUMMARYThis paper presents a review and discussion of micro-fuel cell technologies, providing insight into the innovations that have been made to date. Discussion of concepts and results leading towards increased levels of integration and performance for micro-fuel cell systems will elucidate the potential of thin film and microfabrication methods in meeting the challenges and requirements necessary for consumer applications. While the amount of literature in this area is substantial, a representative sampling of key developments will be presented in this paper, in order to gain a sense of the design methodologies being implemented for micro-fuel cell power sources.

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Section: Miniaturization Methodsmentioning

confidence: 99%

Micro-fuel cell power sources

Morse

2007

Int. J. Energy Res.

168

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“…2.2. Yeom et al (2005) (Univ. of Illinois) reported the fabrication of a monolithic Si-based microscale MEA consisting of two Si electrodes, with catalyst deposited directly on them, supporting a NafionÒ-112 membrane in-between.…”

Section: The Silicon Waymentioning

confidence: 99%

Recent developments in MEMS-based miniature fuel cells

Pichonat

Gauthier‐Manuel

2007

Microsyst Technol

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Micro fuel cells (l-FCs) represent promising power sources for portable applications. Today, one of the technological ways to make l-FCs is to have recourse to standard microfabrication techniques used in the fabrication of micro-electro-mechanical systems (MEMS). This paper shows an overview on the applications of MEMS techniques on miniature FCs by presenting several solutions developed throughout the world. It also describes the latest developments of a new porous silicon-based miniature fuel cell. Using a silane grafted on an inorganic porous media as the proton-exchange membrane instead of a common ionomer such as Nafion Ò , the fuel cell achieved a maximum power density of 58 mW cm -2 at room temperature with hydrogen as fuel.

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“…Using silicon for the microfabrication of MFCs has two advantages: readily available mature microfabrication techniques, and the integration of the device with the rest of the microelectronic circuitry [2][3][4][5][6][7][8][9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

“…Zhang, Lu et al [9] patterned the proton exchange membrane (PEM) with nanoimprint technology to create a thin microporous layer. Yeom et al [6] integrated a micro-porous GDL with their silicon chips by electroplating dendritic platinum black, up to 5 μm thick while the silicon substrate formed a macroporous structure.…”

Section: Introductionmentioning

confidence: 99%

Integration of carbon felt gas diffusion layers in silicon micro fuel cells

Scotti¹,

Kanninen²,

Kallio³

et al. 2012

J. Micromech. Microeng.

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Abstract:We have integrated carbon felt, a traditional fuel cell gas diffusion layer, with silicon micro fuel cells. To this end we used two silicon microfabrication procedures using reactive ion etching: formation of black silicon and sinking of flowfield. The former decreases electrical contact resistance to the diffusion layer, the latter serves to contain the reactant gases. The micro fuel cells, where the flowfield was covered by black silicon nano-needles, showed better performance (127 mW cm -2 ) compared to the same cells without black silicon (114 mW cm -2 ). The black silicon fuel cells were also more stable during an overnight chronoamperometric measurement.

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Microfabrication and characterization of a silicon-based millimeter scale, PEM fuel cell operating with hydrogen, methanol, or formic acid

Cited by 106 publications

References 21 publications

Micro-fuel cell power sources

Micro-fuel cell power sources

Recent developments in MEMS-based miniature fuel cells

Integration of carbon felt gas diffusion layers in silicon micro fuel cells

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