Microfabricated high temperature sensing platform dedicated to scanning thermal microscopy (SThM)

Nguyen, Tran Phong; Lemaire, Etienne; Euphrasie, Sébastien; Thiéry, Laurent; Teyssieux, Damien; Briand, D.; Vairac, Pascal

doi:10.1016/j.sna.2018.04.011

Cited by 12 publications

(8 citation statements)

References 17 publications

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“…Other calibration protocols were proposed; some of them need complicated calibration samples, multi-step procedures, or include numerical simulations. [7,27,[34][35][36] In this work, we developed and implemented a different approach based on the determination of the probe tip apex temperature as a function of the probe current. All calibration measurements are performed in the same setup as the SThM experiments.…”

Section: Calibration Of the Probe And Of The Finite-elements Probe Modelmentioning

confidence: 99%

Quantitative Characterization of Local Thermal Properties in Thermoelectric Ceramics Using “Jumping‐Mode” Scanning Thermal Microscopy

et al. 2023

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Thermoelectric conversion may take a significant share in future energy technologies. Oxide‐based thermoelectric composite ceramics attract attention for promising routes for control of electrical and thermal conductivity for enhanced thermoelectric performance. However, the variability of the composite properties responsible for the thermoelectric performance, despite nominally identical preparation routes, is significant, and this cannot be explained without detailed studies of thermal transport at the local scale. Scanning thermal microscopy (SThM) is a scanning probe microscopy method providing access to local thermal properties of materials down to length scales below 100 nm. To date, realistic quantitative SThM is shown mostly for topographically very smooth materials. Here, methods for SThM imaging of bulk ceramic samples with relatively rough surfaces are demonstrated. “Jumping mode” SThM (JM‐SThM), which serves to preserve the probe integrity while imaging rough surfaces, is developed and applied. Experiments with real thermoelectric ceramics show that the JM‐SThM can be used for meaningful quantitative imaging. Quantitative imaging is performed with the help of calibrated finite‐elements model of the SThM probe. The modeling reveals non‐negligible effects associated with the distributed nature of the resistive SThM probes used; corrections need to be made depending on probe‐sample contact thermal resistance and probe current frequency.

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Section: Calibration Of the Probe And Of The Finite-elements Probe Modelmentioning

confidence: 99%

Quantitative Characterization of Local Thermal Properties in Thermoelectric Ceramics Using “Jumping‐Mode” Scanning Thermal Microscopy

et al. 2023

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“…The power consumption has also been reduced to increase the device sensitivity and the temperature distribution minimized using a circular symmetry for the design. As a result, only a power of 1.5 mW is required to heat up the central part at 100°C typically whereas 5 mW was required in the previous version of calibration devices [20]. To reach this performance and as represented in Fig.…”

Section: Design and Fabricationmentioning

confidence: 99%

“…To support the thermal design of the calibration chip, FEM simulations were performed using Comsol Multiphysics® software. Comparison between two-dimensional (2D) and three-dimensional (3D) simulations showed hardly no difference in a previous thermal calibration device [20]. A 2D model was therefore used here since it requires less computing time.…”

Section: Simulationmentioning

confidence: 99%

“…As a result, T m values logically range between T a and T s and a subsequent question remains on the spatial distribution of T m ; is it a "cold spot" underneath the tip contact or does the perturbation spreads enough to modify the whole surface ? Clearly, previous works have shown that such a thin membrane structure is subjected to a global temperature change [20]. This justifies the use of a 10 µm diameter surface RTD sensor that allows a direct measurement of the modified surface temperature T m without the necessity to locate the tip contact at the very central point of the RTD target.…”

Section: Challenges In Measuring Temperature Using Sthm Probesmentioning

confidence: 99%

“…In any case, tools adapted for calibrating the ability of a probe to measure an absolute temperature in contact condition remain essential. Among different thermal calibration devices currently proposed, some are devoted to lateral spatial resolution or measuring the probe-to-surface heat flux [18][19][20]. Here, we present a calibration device that characterizes quantitavely a SThM probe operating in passive mode, notably:…”

Section: Introductionmentioning

confidence: 99%

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Calibration Tools for Scanning Thermal Microscopy Probes Used in Temperature Measurement Mode

Nguyen

Thiéry

Euphrasie

et al. 2019

Journal of Heat Transfer

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We demonstrate the functionality of a new active thermal microchip dedicated to the temperature calibration of scanning thermal microscopy (SThM) probes. The silicon micromachined device consists in a suspended thin dielectric membrane in which a heating resistor with a circular area of 50 μm in diameter was embedded. A circular calibration target of 10 μm in diameter was patterned at the center and on top of the membrane on which the SThM probe can land. This target is a resistive temperature detector (RTD) that measures the surface temperature of the sample at the level of the contact area. This allows evaluating the ability of any SThM probe to measure a surface temperature in ambient air conditions. Furthermore, by looking at the thermal balance of the device, the heat dissipated through the probe and the different thermal resistances involved at the contact can be estimated. A comparison of the results obtained for two different SThM probes, microthermocouples and probes with a fluorescent particle is presented to validate the functionality of the micromachined device. Based on experiments and simulations, an analysis of the behavior of probes allows pointing out their performances and limits depending on the sample characteristics whose role is always preponderant. Finally, we also show that a smaller area of the temperature sensor would be required to assess the local disturbance at the contact point.

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Local Heat Dissipation and Elasticity of Suspended Silicon Nanowires Revealed by Dual Scanning Electron and Thermal Microscopies

Sojo‐Gordillo,

Gadea‐Diez,

Renahy

et al. 2023

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A novel combined setup, with a scanning thermal microscope (SThM) embedded in a scanning electron microscope (SEM), is used to characterize a suspended silicon rough nanowire (NW), which is epitaxially clamped at both sides and therefore monolithically integrated in a microfabricated device. The rough nature of the NW surface, which prohibits vacuum‐SThM due to loose contact for heat dissipation, is circumvented by decorating the NW with periodic platinum dots. Reproducible approaches over these dots, enabled by the live feedback image provided by the SEM, yield a strong improvement in thermal contact resistance and a higher accuracy in its estimation. The results—thermal resistance at the tip‐sample contact of 188±3.7K µW−1 and thermal conductivity of the NW of 13.7±1.6W m−1 K−1—are obtained by performing a series of approach curves on the dots. Noteworthy, the technique allows measuring elastic properties at the same time—the moment of inertia of the NW is found to be (6.1±1.0) × 10−30m4—which permits to correlate the respective effects of the rough shell on heat dissipation and on the NW stiffness. The work highlights the capabilities of the dual SThM/SEM instrument, in particular the interest of systematic approach curves with well‐positioned and monitored tip motion.

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Microfabricated high temperature sensing platform dedicated to scanning thermal microscopy (SThM)

Cited by 12 publications

References 17 publications

Quantitative Characterization of Local Thermal Properties in Thermoelectric Ceramics Using “Jumping‐Mode” Scanning Thermal Microscopy

Quantitative Characterization of Local Thermal Properties in Thermoelectric Ceramics Using “Jumping‐Mode” Scanning Thermal Microscopy

Calibration Tools for Scanning Thermal Microscopy Probes Used in Temperature Measurement Mode

Local Heat Dissipation and Elasticity of Suspended Silicon Nanowires Revealed by Dual Scanning Electron and Thermal Microscopies

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