Microfabricated Expandable Sensor Networks for Intelligent Sensing Materials

Salowitz, Nathan; Guo, Zhiqiang; Kim, Sang-Jong; Li, Yu-Hung; Lanzara, Giulia; Chang, Fu‐Kuo

doi:10.1109/jsen.2013.2297699

Cited by 43 publications

(33 citation statements)

References 11 publications

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“…Across all frequencies tested, the peak voltage of the first wave packet in the released sample was on average 23% stronger than the baseline sample, and the output signal energy was on average 9% less in the released sample as shown in Figure 6. 26 Additionally, the waveforms were similar, though not identical, in comparable cases. Differences were expected because of differences in the structure the strain waves propagated through.…”

Section: Materials Functionalizationmentioning

confidence: 89%

“…29 In addition, released samples were created with RTDs opposite the piezoceramics as previously described and shown in Figure 9. 19,26 These RTDs were created by spin coating a photoresist layer onto the sample which was patterned using optical photolithography. Then a 50 Å thick Cr bonding layer and 500 Å thick gold layer were deposited using an e-beam evaporator.…”

Section: Materials Functionalizationmentioning

confidence: 99%

“…RTD and piezoelectric transducer on opposite sides of a polyimide layer. 19,26 RTD: resistive temperature detector.…”

Section: Stretching and Integrationmentioning

confidence: 99%

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Recent advancements and vision toward stretchable bio-inspired networks for intelligent structures

Salowitz

Roy

Nardari

et al. 2014

Structural Health Monitoring

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Significant progress has recently been achieved in structural health monitoring, maturing the technology through quantification, validation, and verification to promote implementation and fielding of SHM. In addition, there is ongoing work seeking to detect damage precursors and to deploy structural health monitoring systems over large areas, moving the technology beyond hot-spot monitoring to global state sensing for full structural coverage. A large number of small sensors of multiple types are necessary in order to accomplish the goals of structural health monitoring, enabling increased sensing capabilities while reducing parasitic effects on host structures. Conventional sensors are large and heavy, adding to the weight of a structure and requiring physical accommodation without adding to and potentially degrading the strength of the overall structure. Increased numbers of sensors must also be deployed to span large areas while maintaining or increasing sensing resolution and capabilities. Traditionally, these sensors are assembled, wired, and installed individually, by hand, making mass deployment prohibitively time consuming and expensive. In order to overcome these limitations, the Structures and Composites Lab at Stanford University has worked to develop bio-inspired microfabricated stretchable sensor networks. Adopting the techniques of complementary metal-oxide semiconductor and microelectromechanical system fabrication, new methods are being developed to create integrated networks of large numbers of various micro-scale sensors, processors, switches, and all wiring in a single fabrication process. Then the networks are stretched to span areas orders of magnitude larger than the original fabrication area and deployed onto host structures. The small-scale components enable interlaminar installation in laminar composites or adhesive layers of built-up structures while simultaneously minimizing parasitic effects on the host structure. Additionally, data processing and interpretation capabilities could be embedded into the network before material integration to make the material truly multifunctional and intelligent once fully deployed. This article reviews the current accomplishments and future vision for these systems in the pursuit of state sensing and intelligent materials for self-diagnostics and health monitoring.

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Section: Materials Functionalizationmentioning

confidence: 89%

Section: Materials Functionalizationmentioning

confidence: 99%

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Recent advancements and vision toward stretchable bio-inspired networks for intelligent structures

Salowitz

Roy

Nardari

et al. 2014

Structural Health Monitoring

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“…The sensing system was tested on a highway bridge to measure the dynamic response of the traffic and measurements carried out for a 60-s duration. Other notable works have used photonic crystals [31], carbon-nanotube composite crystals [32], and microfabricated sensor networks [33] to achieve two-dimensional sensing networks. In previous works performed at Princeton University, we developed a thin-film two-dimensional sensing sheet as one possible two-dimensional sensing system using an array of resistive strain gauges, where commercial resistive sensors were wired one by one to a flexible sheet with metal interconnect traces [34].…”

Section: Introductionmentioning

confidence: 99%

Large-Area Resistive Strain Sensing Sheet for Structural Health Monitoring

Aygün

Kumar

Weaver

et al. 2020

Sensors

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Damage significantly influences response of a strain sensor only if it occurs in the proximity of the sensor. Thus, two-dimensional (2D) sensing sheets covering large areas offer reliable early-stage damage detection for structural health monitoring (SHM) applications. This paper presents a scalable sensing sheet design consisting of a dense array of thin-film resistive strain sensors. The sensing sheet is fabricated using flexible printed circuit board (Flex-PCB) manufacturing process which enables low-cost and high-volume sensors that can cover large areas. The lab tests on an aluminum beam showed the sheet has a gauge factor of 2.1 and has a low drift of 1.5 μ ϵ / d a y . The field test on a pedestrian bridge showed the sheet is sensitive enough to track strain induced by the bridge’s temperature variations. The strain measured by the sheet had a root-mean-square (RMS) error of 7 μ ϵ r m s compared to a reference strain on the surface, extrapolated from fiber-optic sensors embedded within the bridge structure. The field tests on an existing crack showed that the sensing sheet can track the early-stage damage growth, where it sensed 600 μ ϵ peak strain, whereas the nearby sensors on a damage-free surface did not observe significant strain change.

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“…8,27,28 The authors have previously reported on developing highly stretchable sensor networks through two-dimensional planar motion and integration of wiring, resistive temperature detectors (RTDs), and screen-printed piezoceramics into the networks. [29][30][31][32][33][34][35][36][37] However, those networks employed simple, direct wire addressing. In order to take advantage of the large number of sensor nodes, switching and onboard processing are also necessary.…”

Section: Introductionmentioning

confidence: 99%

Functionalization of stretchable networks with sensors and switches for composite materials

Kim

Salowitz

Lanzara

et al. 2017

Structural Health Monitoring

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An investigation was performed to develop appropriate techniques to design and fabricate (using complementary metaloxide semiconductor/micro-electro-mechanical systems technologies) highly stretchable networks of distributed sensors and organic diodes that could be stretched, and surface-mounted or embedded into polymeric materials to cover an area several orders of magnitude larger than its original size. Both analysis and experiments were performed to validate the design and fabrication methods. The techniques sought to reduce stresses due to network expansion, and a new spin-coated fabrication process was developed to enable high-resolution features in the network. Networks with temperature sensors and piezoelectric sensors were fabricated and tested to demonstrate functionality in advanced composite materials that are common in aircraft.

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Microfabricated Expandable Sensor Networks for Intelligent Sensing Materials

Cited by 43 publications

References 11 publications

Recent advancements and vision toward stretchable bio-inspired networks for intelligent structures

Recent advancements and vision toward stretchable bio-inspired networks for intelligent structures

Large-Area Resistive Strain Sensing Sheet for Structural Health Monitoring

Functionalization of stretchable networks with sensors and switches for composite materials

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