Microelectromechanical systems (MEMS)

Abstract

In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures; the effect of hole's cross section and plate's extension is observed. Results obtained by F.E.M. models are compared with experimental measurements performed by an optical interferometric microscope.