Microelectromechanical system based variable optical attenuator by vertically bending waveguides

Zhang, Guhong; Jessop, P. E.

doi:10.1116/1.2190651

Cited by 2 publications

(1 citation statement)

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“…After that, various approaches have been made to utilize the directional coupler as an optical attenuator or switch [154,162,[165][166][167][168][169][170][171]. Waveguide-based NEMS VOAs have also been demonstrated [172,173].…”

Section: Nems Voamentioning

confidence: 99%

Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes

Dong¹

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This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nanoactuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The first part of the thesis reports a NEMS actuator driven by optical gradient force. The optical force driven actuator realized by Q-factor modulation of the ring resonator can achieve an actuation range of 14 nm with a resolution of 0.18 nm. An optical displacement sensor is integrated to measure the actuation distance through optomechanical effects. The second part focuses on the development of a NEMS variable optical attenuator. In this design, optical attenuation is realized via a nano-waveguide-based optical directional coupler where the gap between waveguides is modulated by optical gradient force. Optical intensity can be attenuated to 10% of the original value with an actuation distance of at least 150 nm by tuning the wavelength of control light by 2 nm. The third part works on the optomechanical memory based on an optical force-induced bistability. A doubly-clamped silicon beam is actuated by the optical gradient force and bistability occurs as a result of nonlinearity of the optomechanical effects. The memory states can be switched by controlling the optical power from-10 dBm to-6 dBm. The switching speed is less than 150 ns. Summary iv In conclusion, optical NEMS devices, including a nano actuator, a VOA and an optomechanical memory, are demonstrated on a silicon-on-isolator (SOI) platform using nano-silicon-photonic fabrication processes. These devices have numerous and interesting potential applications in next generation optical fibre communications and network systems.

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