Microchannel‐Confined MXene Based Flexible Piezoresistive Multifunctional Micro‐Force Sensor

Abstract

Multifunctional micro‐force sensing in one device is an urgent need for the higher integration of the smaller flexible electronic device toward wearable health‐monitoring equipment, intelligent robotics, and efficient human–machine interface. Herein, a novel microchannel‐confined MXene‐based flexible piezoresistive sensor is demonstrated to simultaneously achieve multi‐types micro‐force sensing of pressure, sound, and acceleration. Benefiting from the synergistically confined effect of the fingerprint‐microstructured channel and the accordion‐microstructured MXene materials, the as‐designed sensor remarkably endows a low detection limit of 9 Pa, a high sensitivity of 99.5 kPa−1, and a fast response time of 4 ms, as well as non‐attenuating durability over 10 000 cycles. Moreover, the fabricated sensor is multifunctionally capable of sensing sounds, micromotion, and acceleration in one device. Evidently, such a multifunctional sensing characteristic can highlight the bright prospect of the microchannel‐confined MXene‐based micro‐force sensor for the higher integration of flexible electronics.

Hot Embossing Process Technology Forming Arbitrary Patterns in Real Time

“…[ 18 ] In addition, the proposed process can contribute to the microforce sensor process, which requires a circular pattern with a pattern depth of 9–78 µm and a pattern width of 50–100 µm on the PET film. [ 19 ] Moreover, we expect that this method could be used for pH sensor production, which requires a 30–100 µm thick comb structure. [ 20 ] Through an example where a micropattern is required, we demonstrate that the proposed process can be widely applied not only to biosensors but also to industries that require various user‐defined patterns on a microscale.…”

MXene-based Sensors for Detecting Human Physiological Information

“…Gao et al illustrated a novel microchannel-confined MXene-based flexible piezoresistive multifunction sensor that could perceive micro-force sensing such as pressure and sound. (35) This proposed sensor exhibited a low detection limit of 9 Pa, high sensitivity of 99.5 kPa −1 , and a short response time of 4 ms. To demonstrate the high sensitivity of the sensor, they attached the sensor to the abdomen and chest of testers to identify three breathing patterns in yoga. (35) The sensor recorded different breathing patterns during abdominal breathing and chest breathing, which were distinguished by different intensities and shapes of the peaks.…”

“…(35) This proposed sensor exhibited a low detection limit of 9 Pa, high sensitivity of 99.5 kPa −1 , and a short response time of 4 ms. To demonstrate the high sensitivity of the sensor, they attached the sensor to the abdomen and chest of testers to identify three breathing patterns in yoga. (35) The sensor recorded different breathing patterns during abdominal breathing and chest breathing, which were distinguished by different intensities and shapes of the peaks. This sensor exhibits huge potential for voice recognition because its high sensitivity enables the detection of subtle signals produced by weak vibration.…”

Wrist flexible heart pulse sensor integrated with a soft pump and a pneumatic balloon membrane

“…To increase health condition datasets available from the skin surface, bandage-type attachable exible sensor sheets with multi-functionalities, which are in direct contact with the skin surface, have been widely studied. [1][2][3][4][5] Direct contact between the sensor and skin allows various vital information to be precisely measured such as skin temperature, 6 perspiration rate, 7 sweat chemical content, [8][9][10][11][12][13] heart pulse, [14][15][16][17] respiration, 18 electrocardiogram, [19][20][21][22] and activity. 23,24 Although more research is necessary to realize practical exible sensor sheets, this platform holds promise to identify minor changes in health conditions and disease in the early stage.…”