“…Therefore, achieving a high-precision and rapid measurement of equipment speed and displacement information is crucial. Typical applications include tracking the motion of cutting tools in high-precision machine tools, real-time monitoring of velocity and distance information during industrial robot operation, high-speed in situ measurement, and dynamic speed analysis of lithography machine processing platforms. − Frequency-modulated continuous-wave (FMCW) laser measurement technology is widely applied in various complex scenarios for precision measurements due to its characteristics of large time-bandwidth product, high measurement accuracy, and strong anti-interference capability. , The fundamental principle of FMCW laser measurement involves acquiring target measurement information through the beat frequency signal generated by interference between the laser echo signal and the local oscillator signal. Traditional static target ranging often assumes no relative motion between the laser detection system and the target. − In practical applications, targets often exhibit relative or high-speed motion.…”