2003
DOI: 10.1364/ao.42.006166
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Microanalysis of tool steel and glass with laser-induced breakdown spectroscopy

Abstract: A laser microscope system for the microanalytical characterization of complex materials is described. The universal measuring principle of laser-induced breakdown spectroscopy (LIBS) in combination with echelle optics permits a fast simultaneous multielement analysis with a possible spatial resolution below 10 pm. The developed system features completely UV-transparent optics for the laser-microscope coupling and the emission beam path and enables parallel signal detection within the wavelength range of 200-80… Show more

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Cited by 27 publications
(12 citation statements)
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“…Recently, it was demonstrated that laser induced breakdown spectroscopy can be utilized for express multielement analysis of laser clad coating [14]. LIBS is a laser based analytical technique quantifying elemental composition with high lateral resolution (typically, 10-50 µm) including depth profile analysis without any sample preparation [15][16][17][18] . The remarkable LIBS feature is a capability to perform simultaneous chemical mapping of almost all elements including light elements as carbon, boron or silicon.…”
mentioning
confidence: 99%
“…Recently, it was demonstrated that laser induced breakdown spectroscopy can be utilized for express multielement analysis of laser clad coating [14]. LIBS is a laser based analytical technique quantifying elemental composition with high lateral resolution (typically, 10-50 µm) including depth profile analysis without any sample preparation [15][16][17][18] . The remarkable LIBS feature is a capability to perform simultaneous chemical mapping of almost all elements including light elements as carbon, boron or silicon.…”
mentioning
confidence: 99%
“…Their emission spectra are measured at the range from UV to visible light, which is feasible by the most spectrometers. The spectra from many elements from the tool steel are shown by the Nd:YAG laser excitation [28]. In this research, the microscopic view of the ablated holes made on tool steel is about 10 microns in diameter.…”
Section: Plasma Emissionmentioning
confidence: 90%
“…LIBS is often the technique of choice in heavy industry thanks to its remote capability and lack of sample preparation. It is used for microcharacterization of solid samples [58], in situ analysis of mineral and metal melts [59,60], and industrial monitoring [61]. Applied to pharmaceutical products, LIBS allows for rapid multicomponent analysis, depth profiling, and the assessment of product homogeneity [62].…”
Section: Laser-induced Breakdown Spectroscopy (Libs)mentioning
confidence: 99%