Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications

Dry Sliding Wear Behavior of Ti6Al4V and TaN against TiN Deposited Steel Surface

“…The XRD pattern of the TiN surface is good agreement with the JCPDS file #77-1893 and #87-0633 for strong peak at (111) plane and weak peak at (311) plane respectively [13]. From the observation of the orientation peak, it was noticed that the reflection plane of (220) is stronger compared other peaks which is due to the small radius of curvature at the peak [14].…”

Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures

“…The hardness of films decreased with the increasing of substrate temperatures, while the hardness (22.5-30.6 GPa) was comparable to that of TiN films (17.3-26.7 GPa) [9], (12.7-27.2 GPa) [10] deposited by DC magnetron sputtering. However, which was lower than that of the TiN film deposited by PLD technique in available literatures (35-40 GPa) [18,27], where the TiN film deposited in some N 2 and CH 4 atmosphere.…”

“…The friction force along the film surface could be partially canceled out by the grain-boundary sliding, especially for the TiN1 film owned the smallest grain size and most gain boundaries. Additionally, the surface roughness of the film coupled with high hardness were critical for tribological performances [10], so the lowest roughness and the highest hardness might be another reasons for the TiN1 film which exhibited the lowest wear rate. The results were also in agreement with the theory [9,32] that the ratio of hardness and elastic modulus (H/E) was possible to evaluate the wear behavior of the films, in which the wear resistance of materials as a function of the H/E ratio, the maximum H/E ratio value correspond to the high anti-wear resistance, as shown in Fig.…”

“…In the past few decades, many researchers have studied the TiN films by a variety of film deposition techniques, including the physical vapor deposition (PVD) [3], chemical vapor deposition (CVD) [4,5], magnetron sputtering (MS) [6][7][8][9][10], ion implantation [11,12], thermal spraying [13,14] and so on. Compared with above methods, the pulsed laser deposition (PLD) technique [15][16][17] has proven to be rapid, efficient, easy operation and cost-effective in the fabrication of high-quality thin films.…”

Reactive magnetron sputtered wear resistant multilayer transition metal carbide coatings: microstructure and tribo-mechanical properties

“…38 Therefore, more mechanical energy is required to plastically deform the coatings across the interface of different TMC layers, having different shear modulus, and thus, it increases the friction and decreases the wear. The larger crystalline domains in single layer coatings facilitate the propagation of plastic deformation along the orientations during tribo-mechanical contact.…”