Micro topography of different material surface by solid abrasive lapped at high speed

Tian, Chunlin; Yang, Jiandong; Fan, Jinwei; Hua-wen, Zhou

doi:10.1117/12.783527

3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technolo 2007

DOI: 10.1117/12.783527

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Micro topography of different material surface by solid abrasive lapped at high speed

Chunlin Tian

Jiandong Yang

Jinwei Fan

et al.

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2012

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“…Fixed abrasive processes such as nanogrinding [16,17] and high-speed lapping [18] involve two body abrasions between the workpiece surface and an abrasive embedded rotating tool.…”

mentioning

confidence: 99%

A Feasibility Study of Vibration-Assisted Nano-Impact Machining by Loose Abrasives Using Atomic Force Microscope

James¹,

Sundaram

2012

Journal of Manufacturing Science and Engineering

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Nanomachining of brittle materials is required in a wide range of applications. This paper reports on the feasibility studies of" vibration-assisted nano-impact machining by loose abrasives (VANILA), a novel nanomachining process for target-specific nanomachining of hard and brittle materials. A mathematical model based on Hertzian fracture mechanics theory has been developed to evaluate the feasibility of material removal in the VANILA process, where hard abrasive grains impact the brittle workpiece suiface. Experimental investigations are conducted using a commercially available atomic force microscope (AFM), to validate the feasibility of the proposed process. Several nanocavities with circular shape, having depths ranging from 6 to 64 nm and diameters ranging from 78 to 276 nm, are successfully machined. Patterns of nanocavities are machined to confirm the repeatability and controllability of the process. Observation of tool tips using a scanning electron microscope (SEM) reveals that the tool wear in the VANILA process is lesser than that observed in indentation process.

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“…Fixed abrasive processes such as nanogrinding [16,17] and high-speed lapping [18] involve two body abrasions between the workpiece surface and an abrasive embedded rotating tool.…”

mentioning

confidence: 99%

A Feasibility Study of Vibration-Assisted Nano-Impact Machining by Loose Abrasives Using Atomic Force Microscope

James¹,

Sundaram

2012

Journal of Manufacturing Science and Engineering

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Micro topography of different material surface by solid abrasive lapped at high speed

Cited by 1 publication

References 0 publications

A Feasibility Study of Vibration-Assisted Nano-Impact Machining by Loose Abrasives Using Atomic Force Microscope

A Feasibility Study of Vibration-Assisted Nano-Impact Machining by Loose Abrasives Using Atomic Force Microscope

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