Micro structuring of inorganic glass by hot embossing of coated glass wafers

Edelmann, Jan; Worsch, Christian; Schubert, Andreas; Rüssel, Christian

doi:10.1007/s00542-009-0961-8

Cited by 14 publications

(11 citation statements)

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“…The thickness of all oxide coatings were approximately 100 nm. The coatings and sample preparation have previously been described (Edelmann et al 2010). The mentioned coatings were used for pressing under inert gas atmosphere.…”

Section: Substrate and Coatingsmentioning

confidence: 99%

“…The applications range from usage in micro-fluid analysis and bioengineering (Tay et al 2006;Khan-Malek et al 2007), applications in micro-optics or increasing of the efficiency of solar cells (Brinksmeier et al 2004;Yan et al 2009). Forming processes based on the viscous flow of the glass melts at high temperatures enable a cost-efficient production of micro structures on glasses (Edelmann et al 2010;Schubert et al 2006;Takahashi et al 2007). The hot forming processes are limited by adherence and sticking of glass to the mould (Klocke and Pongs 2004).…”

Section: Introductionmentioning

confidence: 99%

“…Not the mould, but the glassy substrate was coated with a thin, adhesive and, in a certain extend, ductile coating (Edelmann et al 2010). To obtain high aspect ratios and structures in the micron-range, the embossing was realized under isothermal conditions.…”

Section: Introductionmentioning

confidence: 99%

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Determination of adhesive forces and sticking temperature of coated glasses for the hot-embossing-process

et al. 2011

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In contrast to previous studies a new coating strategy was developed to decouple the viscosity in the glass volume from the sticking behaviour at the glass surface. Not the mould, but the glassy substrate was coated with a thin, adhesive and ductile layer. For that purpose, soda-lime silica and borosilicate glasses were coated with gold, chromium, carbon, silica or titanium oxide. The isothermal hot embossing was carried out under air or, however, under argon atmosphere with a pressure of 500 Pa. Under vacuum inert gas atmosphere, all examined coatings shift the sticking temperatures by around 80 K to temperatures near the Littleton-temperature of the glass, which is even higher than the temperature process range of micro structuring. The adhesive forces are <10% in comparison to those observed at uncoated glass substrates. Under air, the increase in the sticking temperature is not as pronounced. The coatings on the glass enable to apply hot embossing at higher temperatures and hence at smaller viscosities. Hence high shear rates and a reduction of embossing forces are enabled

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Section: Substrate and Coatingsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Determination of adhesive forces and sticking temperature of coated glasses for the hot-embossing-process

et al. 2011

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“…Microstructured components are for example fabricated in the field of Micro-optics by using hot embossing of borosilicate glass [25,26]. Surface features of some micrometers are standard requirements for this application.…”

Section: Introductionmentioning

confidence: 99%

Structuring of bioactive glass surfaces at the micrometer scale by direct casting intended to influence cell response

Pföss¹,

Bührig–Polaczek²,

Fischer³

et al. 2016

Biomedical Glasses

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Defect-free bioactive glass surfaces with a grooved microstructure at the low micrometer scale were achieved by a mold casting process. The process was applied to the well-known glass compositions 45S5 and 13-93. Such microstructured surfaces may exhibit especially favorable conditions for bone cell orientation and growth. The aim of the study was to assess the parameter range for a successful casting process and thus to produce samples suitable to investigate the interaction between structured surfaces and relevant cells. Viscous flow in its temperature dependence and thermal analysis were analyzed to identify a suitable process window and to design a manageable time-temperature process scheme. Counteracting effects such as formation of chill ripples, mold sticking and build-up of permanent thermal stress in the glass had to be overcome. A platinum gold alloy was chosen as mold material with the mold surface bearing the mother shape of the microstructure to be imprinted on the glass surface. First experiments studying the behavior of osteoblast-like cells, seeded on these microstructured glass surfaces revealed excellent viability and an orientation of the cells along the microgrooves. The presented results show that direct casting is a suitable process to produce defined microstructures on bioactive glass surfaces.

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“…They all have certain drawbacks. In the case of pattern processing in coated silica glass (Edelmann et al 2012) it is necessary to additionally coat the glass substrate with thin metal, carbon and oxide layers to reduce the sticking of glass melts to the moulding tools. In the case of metallic glasses (Pan et al 2008;Chu et al 2007) the process of the glass manufacturing is complicated.…”

mentioning

confidence: 99%

Fabrication and characterization of microlenses made of tellurite and heavy metal oxide glass developed with hot embossing technology

et al. 2013

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In this paper we describe the work on application of hot embossing process to fabrication of micro-optical elements transmitting in the visible, near infrared and mid-infrared part of spectrum, using multi-component soft glasses as starting materials. Description of used hot embossing (HE) process is provided, followed by discussion of rheological and viscosity properties of several glass types considered for demonstrator fabrication experiment. Demonstrator microlenses were fabricated from lead-bismuth-gallium oxide (PBG08) and tellurite glasses (TWPN/I/6), with transmission windows extending from the visible up to the mid-infrared (up to around 6.5 μm). Fabricated elements, which included diffractive and refractive lenses and lens arrays, were examined in context of homogeneity (quality of pattern replication) and obtained optical properties (M 2 , focal length, resolution). A demonstrator microscope objective was constructed using refractive plano-concave, plano-convex and biconvex lenses fabricated with the HE setup and its optical characteristics were provided.

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Micro structuring of inorganic glass by hot embossing of coated glass wafers

Cited by 14 publications

References 10 publications

Determination of adhesive forces and sticking temperature of coated glasses for the hot-embossing-process

Determination of adhesive forces and sticking temperature of coated glasses for the hot-embossing-process

Structuring of bioactive glass surfaces at the micrometer scale by direct casting intended to influence cell response

Fabrication and characterization of microlenses made of tellurite and heavy metal oxide glass developed with hot embossing technology

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