Micro-structure of ITO ceramics sintered at different temperatures and its effect on the properties of deposited ITO films

Microstructure, grain orientation, and properties of ITO ceramics sintered with various heating rates

“…The reason may be the differences of tin concentration distribution in the coarse and fine grains. As same as the result shown in Figure , the distributions of coarse grains and fine grains are interval . The average grain sizes of coarse grains in samples S‐1# and S‐2# are 4.6 μm and 3.5 μm, respectively.…”

“…It is generally accepted that these free carriers are generated by two mechanisms: (1) tin atom substitution of indium atom and giving out one extra electron, and (2) oxygen vacancies acting as two electron donors . In this work, the same sintering temperature results in the similar solubility of tin oxide in In 2 O 3 phase, thus for the two samples, the difference in the free carriers generated by the mechanism (1) is small. Therefore, the effect of generation mechanism of free electrons on the electrical resistivity is not discussed in this part.…”

“…From the In 2 O 3 ‐ SnO 2 binary phase diagram, it is clear that the reactions occur and form the In 4 Sn 3 O 12 phase at above 1350°C and the In 2 SnO 5 phase at above 1575°C . In order to study the phase compositions in samples S‐1# and S‐2#, the XRD analysis was conducted on these samples and obtained XRD patterns are presented in Figure .…”

“…A number of manufacturing processes have been focused on studying the intrinsic performances of ITO targets, such as the sintering behavior and densification, the phase compositions and the solubility of tin in indium oxide, the ITO targets with various SnO 2 content and grain size, etc. Also, Mei et al have carried out a series of studies on the microstructure of ITO targets and its effects on the properties of ITO films . They considered that high density and uniform structure are essential to prepare the ITO films of high quality.…”

Optimization Preparation of Indium Tin Oxide Nanoparticles via Microemulsion Method Using Orthogonal Experiment

“…Indium tin oxide (ITO) is an n-type semiconductor oxide [1,2]. In recent years, due to low resistivity combined with high transparency to visible light [3,4], ITO films have been widely used in various technological areas, including flat panel displays [5,6], solar cells [7,8], gas sensors [9,10] and organic light emitting diodes [11,12]. ITO thin films are usually prepared by magnetron sputtering [13], using ITO targets as raw materials.…”