2013
DOI: 10.1364/oe.21.011994
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Micro-strain sensing using wrinkled stiff thin films on soft substrates as tunable optical grating

Abstract: We report a strain sensing approach that utilizes wrinkled patterns on poly (dimethylsiloxane) (PDMS) as an optical grating to measure thermally-induced strain of different materials. The mechanism for the strain sensing and the effect of PDMS grating on strain sensing are discussed. By bonding the PDMS grating onto a copper or silicon substrate, the coefficient of thermal expansion (CTE) of the substrates can be deduced by measuring the diffraction angle change due to the change in PDMS grating periodicity wh… Show more

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Cited by 55 publications
(35 citation statements)
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“…One class of optical components often requiring submicrometer features are diffraction gratings which are already found a wide of range of applications in telecommunication and spectroscopy . The use of a flexible substrate, such as PDMS, offers the potential for tuning the grating's period and diffraction properties via mechanical deformation …”
Section: Mechanically Tunable Diffraction Gratingsmentioning
confidence: 99%
“…One class of optical components often requiring submicrometer features are diffraction gratings which are already found a wide of range of applications in telecommunication and spectroscopy . The use of a flexible substrate, such as PDMS, offers the potential for tuning the grating's period and diffraction properties via mechanical deformation …”
Section: Mechanically Tunable Diffraction Gratingsmentioning
confidence: 99%
“…The buckling of the stiff film/compliant substrate system has been treated as a desirable means of generating various self-organized patterns with intrinsic wavelengths [6][7][8]. It finds a broad range of potential applications in, for instance, the thin-film metrology [9,10], tunable optical gratings [11,12], and stretchable electronics which can undergo a considerable deformation with the internal stress being less than the material strength [13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…The calculated results of the Young's modulus of the coating showed quite good agreement with one measured by a conventional indentation method. The similar approaches are used for high sensitive micro‐strain and pressure sensing ,…”
Section: Wrinkles On Soft Materialsmentioning
confidence: 97%