Micro-rapid-prototyping via multi-layered photo-lithography

Thian, S. C. H.; Tang, Yew Chung; Fuh, Jerry Ying Hsi; Wong, Yin Kwan; Li, Lu; Loh, Han Tong

doi:10.1007/s00170-005-2620-2

Cited by 15 publications

(2 citation statements)

References 1 publication

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“…One of the limitations of conventional photolithography, which is broadly used to manufacture two-dimensional architectures, is the difficulty to fabricate three-dimensional shapes. Due to this limitation, three-dimensional extensions of traditional photolithography such as multilayer lithography and two-photon lithography have gained interest [5][6][7][8]. However, these techniques are complex for implementation in freeform manufacturing and time-consuming.…”

Section: Introductionmentioning

confidence: 99%

Programmable self-foldable films for origami-based manufacturing

George

Madou

Hernandez

2020

Smart Mater. Struct.

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Manufacturing of three-dimensional structures of millimeter and sub-millimeter sizes is required in emerging applications in microelectronics, packaging, and particle entrapment. This paper presents a manufacturing method for three-dimensional polyhedral structures at such scales enabled by programmable, self-foldable polymer films. The manufacturing method starts with a three-dimensional target shape and uses origami design to generate the outline and fold pattern of a planar film that can be folded towards the target shape. Double-exposure photolithography is employed to pattern a polymer film based on the generated geometry along with stiff faces of high crosslinking density and flexible folds of low crosslinking density. During the development step of the photolithography process, the folds absorb the developer solution from one side, creating a concentration gradient across their thickness. The non-uniformly absorbed developer in the folds is evaporated when the film is heated, causing non-uniform strains across their thickness and enabling self-folding. It is experimentally determined that the fold angles exhibited by the folds are directly proportional to the ratio between their width along the folding direction and the film thickness, which enables programming of the folding response through modulation of the fold dimensions. Different structures are fabricated to demonstrate the effectiveness of the developed manufacturing method.

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Section: Introductionmentioning

confidence: 99%

Programmable self-foldable films for origami-based manufacturing

George

Madou

Hernandez

2020

Smart Mater. Struct.

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“…Detrimentally, controllers with integral action are severely limited in bandwidth by the mechanical resonance which imposes a low gain-margin. Contrary to the low speed achievable with piezoelectric tube scanners, many scanning applications are demanding faster scan rates with greater accuracy and resolution, [10], [11], [12], [13], [14].…”

Section: Introductionmentioning

confidence: 99%

A new robust damping and tracking controller for SPM positioning stages

Fleming

Aphale

Moheimani

2009

2009 American Control Conference

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This paper demonstrates a simple second-order controller that eliminates scan-induced oscillation and provides integral tracking action. The controller can be retrofitted to any scanning probe microscope with position sensors by implementing a simple digital controller or op-amp circuit. The controller is demonstrated to improve the tracking bandwidth of an NT-MDT scanning probe microscope from 15 Hz (with an integral controller) to 490 Hz while simultaneously improving gain-margin from 2 dB to 7 dB. The penalty on sensor induced positioning noise is minimal.For the Scanning Probe Microscope considered in this paper, the noise is marginally increased from 0.30 nm RMS to 0.39 nm RMS. Open-and closed-loop experimental images of a calibration standard are reported at speeds of 1 and 10 lines per second (with a scanner resonance frequency of 290 Hz). Compared to traditional integral or PID controllers, the proposed controller provides a bandwidth improvement of approximately ten times. This allows faster imaging and less tracking lag at low speeds.

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Hybrid forging processes of micro-double gear using micro-forming technology

Shan

Wang

et al. 2008

Int J Adv Manuf Technol

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Micro-rapid-prototyping via multi-layered photo-lithography

Cited by 15 publications

References 1 publication

Programmable self-foldable films for origami-based manufacturing

Programmable self-foldable films for origami-based manufacturing

A new robust damping and tracking controller for SPM positioning stages

Hybrid forging processes of micro-double gear using micro-forming technology

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