Micro position control of a designed 3-PRR compliant mechanism using experimental models

Acer, Merve; Şabanoviç, Asif

doi:10.1109/ascc.2013.6606259

Cited by 3 publications

(2 citation statements)

References 17 publications

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“…The control system transmits the 16-bit resolution analog voltage to PZT actuator, which realizes the continuum structure fine positioning displacement ( x – y − θ ) in the optimized moving platform as shown in Figure 22 . The displacement detection device obtains the actual displacement data in voltage mode, and can feedback to the controller in need of positioning [ 36 ]. Compared with the commanded and actual position, the controller can adjust driving voltage deviation to achieve steady and fine positioning.…”

Section: Experiments and Resultsmentioning

confidence: 99%

Multi-Objective Topology Optimization of a Compliant Parallel Planar Mechanism under Combined Load Cases and Constraints

et al. 2017

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This paper focuses on a new type of configuration design of a compliant parallel mechanism (CPM) planar continuum structure and its characteristic analysis of vibration-inherent frequency for planar motion, which can suppress the impact of random vibration in ultra-precision positioning and manufacturing equipment and improve the inherent frequency response of the mechanism. Firstly, a vector-mapping isomorphism between the fully CPM and conventional isomorphic parallel mechanism was constructed with a kinematic differential Jacobian matrix. Then, the mathematical model of topology optimization was put forward considering the compromise programming on the static stiffness and mean vibration-inherent frequency of the mechanism as the design variable and the minimization of compliance as the objective function. A constraint of volume fraction was considered and multi-objective micro displacement mechanism topology optimization based on a prismatic-revolute-revolute (3-PRR) planar nano-positioning continuum structure was performed using the solid isotropic material with penalization (SIMP) technique, which combines the criteria of the optimization algorithm and the vector isomorphic mapping method. Multi-objective topology optimization of the continuum structure micro displacement mechanism was investigated and presented by optimizations with different initial rejection rates. The simulation results show that the stiffness and vibration suppression performance of the continuum structure were improved, whereas the positioning of differential kinematics characteristics of the 3-PRR micro displacement planar fully CPM and isomorphic prototype mechanism retain the same. The modal analysis also provides a rational configuration for the micro displacement mechanism dimensional design and its optimal modal parameters. The crossover oscillation in frequency response of the continuum structure was reduced and quickly converged in the optimization iterations. The performance of the optimized mechanism was verified by the experiments on a planar fully compliant micro displacement continuum structure based on Lead Zirconate Titanate (PZT) actuator.

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Section: Experiments and Resultsmentioning

confidence: 99%

Multi-Objective Topology Optimization of a Compliant Parallel Planar Mechanism under Combined Load Cases and Constraints

et al. 2017

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“…The motion range of the micro manipulation stage is typically within several microns, for the reason of limited rotational scope of flexure hinges and limited stroke of piezoelectric actuators which are widely utilized in all kinds of flexure-based stages (Polit and Dong, 2011). For the purpose of getting better performance of the micromanipulation stage, more and more optimized flexure hinges with outstanding characteristics, such as more accurate in position and large motion scope, are designed by researchers (Acer and Sabanovic, 2013;Yi et al, 2003;Qin et al, 2013;Hao and Li, 2014).…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

Ding

Xiao

et al. 2017

Mech. Sci.

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Abstract. Flexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The designed monolithic manipulator has three degrees of freedom (DOF), i.e. two translations along the X and Y axes and one rotation around Z axis. In order to get a large workspace, the lever mechanism is adopted to magnify the stroke of the piezoelectric actuators and also the leaf beam flexure is utilized due to its large rotational scope. Different from conventional pre-tightening mechanism, a modified pre-tightening mechanism, which is less harmful to the stacked actuators, is proposed in this paper. Taking the circular flexure hinges and leaf beam flexures hinges as revolute joints, the forward kinematics and inverse kinematics models of this stage are derived. The workspace of the micromanipulator is finally obtained, which is based on the derived kinematic models.

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Sensor layouts for a long-stroke nano-positioning stage

Chen

Wang

et al. 2014

2014 Proceedings of the SICE Annual Conference (SICE)

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Micro position control of a designed 3-PRR compliant mechanism using experimental models

Cited by 3 publications

References 17 publications

Multi-Objective Topology Optimization of a Compliant Parallel Planar Mechanism under Combined Load Cases and Constraints

Multi-Objective Topology Optimization of a Compliant Parallel Planar Mechanism under Combined Load Cases and Constraints

Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

Sensor layouts for a long-stroke nano-positioning stage

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