Micro‐Particles as Electrostatic Probes for Plasma Sheath Diagnostics

Wolter, Matthias; Haass, M.; Ockenga, T.; Blažek, J.; Kersten, Holger

doi:10.1002/ppap.200931603

Cited by 6 publications

(3 citation statements)

References 18 publications

(67 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…By monitoring the dependence of the position and movement of the particles dependent on the discharge parameters in front of electrodes and substrate surfaces, information about the plasma can be obtained where other plasma diagnostic methods fail. Several authors carried out related experiments in front of rf-driven electrodes where the balancing electrostatic fields are rather large [2,4]. In fig.…”

Section: Particles As Electrostatic Probes In a Plasma Sheathmentioning

confidence: 99%

Microparticles as Plasma Diagnostic Tools

Maurer

Schneider

Wolter

et al. 2011

Contrib. Plasma Phys.

View full text Add to dashboard Cite

An interesting aspect in the research of complex (dusty) plasmas is the experimental study of the interaction of microparticles with the surrounding plasma for diagnostic purposes. Local electric fields can be determined from the behavior of particles in the plasma, i.e. particles may serve as electrostatic probes. From particle trajectories, also the determination of momentum flux in beams is possible, and the particles serve as force probes. Recently, temperature sensitive features of particular phosphors were utilized for measuring the surface temperature of microparticles confined in the sheath of a rf plasma. The experiments were performed under variation of gas pressure and rf power of the process plasma and offer a promising approach for the improvement of process plasmas and the understanding of plasma-particle interaction.

show abstract

Section: Particles As Electrostatic Probes In a Plasma Sheathmentioning

confidence: 99%

Microparticles as Plasma Diagnostic Tools

Maurer

Schneider

Wolter

et al. 2011

Contrib. Plasma Phys.

View full text Add to dashboard Cite

show abstract

“…As such, this effect can be used to experimentally study the magneto hydrodynamic interaction of the plasma with applied and self-induced fields providing an interesting opportunity to 'map' the plasma at much lower field strengths. While the dust-field interaction has been used to study the electric field within the ion-wake of a particle [47], map the plasma potential [48,49] and study the RF sheath [50, 51] within a glass box, the interaction of dust as a flow diagnostic for the interaction of plasma flows with magnetic fields has not been studied very extensively in experiments yet.…”

Section: Charged Dust As a Diagnosticmentioning

confidence: 99%

The IPG6-B as a research facility to support future development of electric propulsion

et al. 2022

View full text Add to dashboard Cite

The inductively-heated plasma generator IPG6-B at Baylor University has been established and characterized in previous years for use as a flexible experimental research facility across multiple applications. The system uses a similar plasma generator design to its twin-facilities at the University of Stuttgart (IPG6-S) and the University of Kentucky (IPG6-UKY). The similarity between these three devices offers the advantage to reproduce results and provides comparability to achieve cross-referencing and verification. Sub-and supersonic flow conditions for Mach numbers between M a = 0.3 − 1.4 have been characterized for air, argon, helium and nitrogen using a pitot probe. Overall power coupling efficiency as well as specific bulk enthalpy of the flow have been determined by calorimeter measurements to be between η = 0.05 − 0.45 and h s = 5 − 35 MJ kg −1 respectively depending on gas type and pressure. Electron temperatures of T e = 1 − 2 eV and densities n e = 10 18 − 10 20 m −3 have been measured using an electrostatic probe system. At Baylor University, laboratory experiments in the areas of astrophysics, geophysics as well as fundamental research on complex (dusty) plasmas are planned. The study of fundamental processes in low-temperature plasmas connects directly to electric propulsion systems.

show abstract

“…Along with other plasma-grown carbon nanostructures, the nanoparticles grown directly in the volume of process chamber are of a particular interest due to possible precise deposition onto specific locations using custom-shaped electric fields immediately after nucleation and growth in the gas phase. 94 The plasma technique allows efficient nucleation and growth of the carbon nanoparticles from carbon-containing gases. 95,96 In typical experiments, 97 a specially designed setup was used in which an asymmetric radio-frequency discharge at 13.56 MHz is sustained.…”

Section: E Synthesis Of Carbon Nanoparticles In Radio-frequency Plasmamentioning

confidence: 99%

Low-temperature plasmas in carbon nanostructure synthesis

Levchenko

Keidar

et al. 2013

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

Self Cite

View full text Add to dashboard Cite

Plasma-based techniques offer many unique possibilities for the synthesis of various nanostructures both on the surface and in the plasma bulk. In contrast to the conventional chemical vapor deposition and some other techniques, plasma-based processes ensure high level of controllability, good quality of the produced nanomaterials, and reduced environmental risk. In this work, the authors briefly review the unique features of the plasma-enhanced chemical vapor deposition approaches, namely, the techniques based on inductively coupled, microwave, and arc discharges. Specifically, the authors consider the plasmas with the ion/electron density ranging from 10 10 to 10 14 cm À3 , electron energy in the discharge up to $10 eV, and the operating pressure ranging from 1 to 10 4 Pa (up to 10 5 Pa for the atmospheric-pressure arc discharges). The operating frequencies of the discharges considered range from 460 kHz for the inductively coupled plasmas, and up to 2.45 GHz for the microwave plasmas. The features of the direct-current arc discharges are also examined. The authors also discuss the principles of operation of these systems, as well as the effects of the key plasma parameters on the conditions of nucleation and growth of the carbon nanostructures, mainly carbon nanotubes and graphene. Advantages and disadvantages of these plasma systems are considered. Future trends in the development of these plasma-based systems are also discussed. [

show abstract

Micro‐Particles as Electrostatic Probes for Plasma Sheath Diagnostics

Cited by 6 publications

References 18 publications

Microparticles as Plasma Diagnostic Tools

Microparticles as Plasma Diagnostic Tools

The IPG6-B as a research facility to support future development of electric propulsion

Low-temperature plasmas in carbon nanostructure synthesis

Contact Info

Product

Resources

About