Micro-optics

Herzig, Hans Peter; Kley, Ernst‐Bernhard; Cumme, Matthias; Wittig, Lars C.

doi:10.1117/3.2265061.ch3

Cited by 5 publications

(9 citation statements)

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“…Variations on the grating structure may be used for realizing diffractive microlenses [39] . An example is shown in Figure 10 : a Fresnel-like structure, reminiscent of that shown in Figure 8, may also be conceived as a diffractive element.…”

Section: Diffractive Lensesmentioning

confidence: 99%

Micro-optics: a micro-tutorial

Zappe

2012

Advanced Optical Technologies

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Micro-optics represents a rich discipline with many features not found in classical optics. Yet micro-optics is not merely ' small optics ' . Using the technologies of microfabrication, entirely new fabrication processes, new materials and new types of optical devices have been conceived. Here, we provide a brief introduction to the fi eld, discussing a variety of miniaturized optical components, as well as the materials from which they are made and the novel technologies used to fabricate them. Designed as a tutorial, this brief pr é cis includes adequate literature references to guide the interested reader to more in-depth treatments.

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Section: Diffractive Lensesmentioning

confidence: 99%

Micro-optics: a micro-tutorial

Zappe

2012

Advanced Optical Technologies

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“…A TiO 2 -organic hybrid gel films prepared from titanium tetra-n-butoxide (Ti(O-nBu) 4 ) was reacted with b-diketone: DBM or MEAcAc, by the sol-gel method.…”

Section: Preparation Of Tio 2 -Organic Hybrid Materialsmentioning

confidence: 99%

“…Two-(2D) and three-dimensional (3D) periodic patterns on the scale of the wavelength of light have been applied to fabricate optical devices such as diffraction grating, 1)- 3) microlens array, 4) anti-reflection effects 5), 6) and photonic crystals (PhCs).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of organic-inorganic hybrid patterns by lithography

Segawa¹

2008

J. Ceram. Soc. Japan

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Periodic patterns with submicrometer to micrometer repetitions are known to be applicable for various optical devices such as diffractive gratings and photonic crystal. In this paper, the periodic patterns of organic-inorganic hybrid materials have been fabricated by photolithography using UV and laser. The hybrid materials derived by the sol-gel method were composed of inorganic materials modified photosensitive organic groups. The photosensitive materials were irradiated periodically by UV light or multi-beam laser interference light, and periodic patterns were fabricated by removal of the unirradiated parts and rinse using the chemical solutions. The pillar sizes such as the height and the distance between neighboring pillars and kinds of the rinse liquids were controlled, resulting in the pillar patterns. Especially, new pillar patterns, in which the pillars are gathered at the top, were obtained by the capillary force between pillars during the drying of the rinse liquid. The interference light of femtosecond beams were irradiated for the TiO 2 -organic hybrid materials with high refractive index, and periodic patterns with submicrometer repetitions were fabricated. The patterns were controlled by the number of the beam, and various kinds of two-or threedimensional periodic patterns were obtained.

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“…1,2 Especially for applications in the visible range of the light spectrum as in the case of product safety items or when high diffraction angles and efficiencies are required, feature sizes of the diffractive or holographic microstructures must be decreased down to the submicron range. Hence, suitable fabrication techniques are necessary among which electron beam writing is one of the most frequently used.…”

Section: Introductionmentioning

confidence: 99%

“…Hence, suitable fabrication techniques are necessary among which electron beam writing is one of the most frequently used. 2 Common fabrication processes which are capable of creating structures in the nanometer range often suffer from high process times of up to several hours and, in addition, the initial costs of these systems exceed common budgets of small research facilities or companies. Several attempts have been made to overcome these drawbacks.…”

Section: Introductionmentioning

confidence: 99%

Digital mirror devices and liquid crystal displays in maskless lithography for fabrication of polymer-based holographic structures

Rahlves

Kelb

Rezem

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Polymer-based holographic and diffractive optical elements have gained increasing interest due to their potential to be used in a broad range of applications, such as illumination technology, micro-optics, and holography. We present a production process to fabricate polymer-based diffractive optical elements and holograms. The process is based on maskless lithography, which is used to fabricate optical elements in photoresist. We discuss several lab-level lithography setups based on digital mirror devices and liquid crystal devices with respect to illumination efficiency, resolution, and contrast. The entire optical setup is designed with emphasis on low-cost components, which can be easily implemented in an optical research lab. In a first step, a copy of the microstructures is replicated into optical polymeric materials by means of a soft stamp hot embossing process. The soft stamp is made from polydimethylsiloxan, which is coated onto the microstructure in the photoresist. The hot embossing process is carried out by a self-made and low-cost hot embossing machine. We present confocal topography measurements to quantify the replication accuracy of the process and demonstrate diffractive optical elements and holographic structures, which were fabricated using the process presented.

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Micro-optics

Cited by 5 publications

References 0 publications

Micro-optics: a micro-tutorial

Micro-optics: a micro-tutorial

Fabrication of organic-inorganic hybrid patterns by lithography

Digital mirror devices and liquid crystal displays in maskless lithography for fabrication of polymer-based holographic structures

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