Micro-optical components for fiber and integrated optics realized by the LIGA technique

Gerner, M.; Paatzsch, Thomas; Weber, Lutz; Schift, Helmut; Smaglinski, Ingo; Bauer, Hans-Dieter; Abraham, Michaël; Ehrfeld, W.

doi:10.1109/memsys.1995.472600

Cited by 10 publications

(7 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In section 6, alignment tolerances are considered, and in section 7, the effect of optical surface curvature. In sections 8,9,10, and 11, the principles of MEMS variable attenuators, switches, filters, and tunable lasers are described. Mechanical alignment issues are discussed and conclusions are drawn in section 12.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Principles of free-space optical microelectromechanical systems

Syms

2008

Proceedings of the Institution of Mechanical Engineers, Part C:

View full text Add to dashboard Cite

Optical microelectromechanical systems (MEMS) combine miniature optical components with precision fixtures, elastic suspensions, and microactuators, and allow complex functionality at low cost. However, the effect of the bounded nature of the beams propagating through the system on design is profound. The current paper reviews the fundamental consequences. Using a Gaussian beam formulation, models of guided modes in gradient index media, bounded beams and imaging components are constructed. Propagation algorithms are described. The alignment tolerances for common component trains such as fibre-to-fibre and beam-to-fibre connections are derived, limits on the curvature of reflecting surfaces are established, the scaling laws of free-space optical MEMS are presented and the effect of beam size on filter performance is clarified. Examples such as variable optical attenuators, optical cross-connect switches, filters and tunable lasers are discussed.

show abstract

Section: Introductionmentioning

confidence: 99%

“…Mechanical alignment issues are discussed and conclusions are drawn in section 12. [8], polysilicon surface micromachining [9], synchrotron lithography and electroplating (LIGA) [10], and deep reactive ion etching (DRIE) of bonded silicon-on insulator (BSOI) [11], as shown in Fig. 1.…”

Section: Introductionmentioning

confidence: 99%

Principles of free-space optical microelectromechanical systems

Syms

2008

Proceedings of the Institution of Mechanical Engineers, Part C:

View full text Add to dashboard Cite

show abstract

“…However, laser attachment and waveguide manufacture techniques are becoming mature and it is the fiber attachment that limits integrated optics from becoming a cost effective technique. Until recently, fiber attachment has been realized by a variety of approaches, including gluing, twin V-grooves in aluminum [6], LIGA-based flexible structures [7,8], and welding of metal-coated fibers onto metal-coated V-grooves [6]. More recently, it has been proposed to use mechanical clips based on either silicon [1][2][3] or silicon nitride [4].…”

Section: Introductionmentioning

confidence: 99%

Mechanics of micromechanical clips for optical fibers

Lu¹,

Moore²,

Chia³

2002

J. Micromech. Microeng.

View full text Add to dashboard Cite

The use of single-mode optical fibers in telecommunications is widespread. However, current laser pig-tailing methods employing either glue or weld to secure the fibers in place are costly and there are inherent problems such as initial fiber mis-alignment, movement during bonding and instability during the service life. An innovative mechanical solution using silicon or silicon nitride clips has recently been proposed to address the issue (Strandman and Bäcklund 1995 Proc. SPIE 2639 18, Strandman and Bäcklund 1997 J. Microelectromech. Syst. 6 35, Strandman and Bäcklund 1998 J. Micromech. Microeng. 8 39, Bostock et al 1998 J. Micromech. Microeng. 8 343, Liu and Lu 2001 J. Micromech. Microeng. 11 195). This paper analyses the mechanical properties of such clips, with special focus placed on crack initiation and propagation due to excessive loading. The singular stress fields near the corner of the clip and substrate are calculated by the method of finite elements, and theoretical models are developed to predict the initiation of failure for clip/substrate systems having various geometrical dimensions and material combinations. The orientations of the initial crack as well as crack growth processes are discussed. The predicted failure modes are compared with those observed in silicon nitride/silicon systems.

show abstract

“…To reduce transmission loss in fully integrated optoelectronic microsystems, it is well known that precise alignment of the optical fibres is vitally important. A variety of approaches have been attempted to achieve this, including gluing, twin aluminium V-grooves [1], LIGA-based flexible structures [2,3], and welding of metal-coated fibres onto metal-coated V-grooves [1]. More recently, it has been proposed to use mechanical clips based on either silicon [4,5] or silicon nitride [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Optimal design of optical fibre-holding microclips with metamorphic development

Liu

2001

J. Micromech. Microeng.

View full text Add to dashboard Cite

Silicon-or silicon nitride-based microclips have recently been developed to hold optical fibres in micro-optical systems for high optical coupling efficiency. The fabrication process is simple, with one or two lithographic steps required on a thin film deposited on a silicon substrate. Single-mode optical fibres are inserted and held in position in V-shaped grooves etched in silicon substrates by the cantilever clips protruding from the edges of the V grooves. As the fibre core is, in general, either level with or above the silicon surface, the clips are deflected by the fibre and act as springs holding the fibres kinematically in place. Ideally, the mass and thickness of the film clips should be minimized. However, the design of the microclips is faced with apparent contradicting constraints: on the one hand, the clips need to be sufficiently flexible for fibre connections and disconnections; on the other hand, they need to be sufficiently stiff so that the clamping force exerted on the fibres is reliable. Additional problems that must be addressed in designing the clips include substrate spalling and interfacial debonding due to stress concentrations at the clip-substrate joint. In this work the optimal thickness, mass and shape of the fibre-holding clips are studied with an effective optimization procedure, called 'metamorphic development' (MD). This procedure, coupled with the method of finite elements, aims at finding structural shapes and topologies of the microclips that minimize their structural compliance and weight, subject to stress and deflection constraints. It allows the clips to grow and degenerate from the simplest possible start-up geometry towards an optimum topological layout.

show abstract

Micro-optical components for fiber and integrated optics realized by the LIGA technique

Cited by 10 publications

References 4 publications

Principles of free-space optical microelectromechanical systems

Principles of free-space optical microelectromechanical systems

Mechanics of micromechanical clips for optical fibers

Optimal design of optical fibre-holding microclips with metamorphic development

Contact Info

Product

Resources

About