Tribology Issues and Opportunities in MEMS 1998
DOI: 10.1007/978-94-011-5050-7_17
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Micro/Nanotribology: State of the Art and Its Applications

Abstract: Abstract. Atomic force microscopy/friction force microscopy (AFM/FFM) techniques are increasingly used for tribological studies of engineering surfaces at scales, ranging from atomic and molecular to microscales. These techniques have been used to study surface roughness, adhesion, friction, scratching/wear, indentation, detection of material transfer, and boundary lubrication and for nanofabrication/nanomachining purposes. Measurement of atomic-scale friction of a freshly-cleaved highly-oriented pyrolytic gra… Show more

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Cited by 33 publications
(42 citation statements)
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References 31 publications
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“…Therefore, by reducing friction by 1%, the annual fuel consumption worldwide is projected to be reduced by 1 billion liters based on the total consumption in 2015 [2]. Furthermore, more than 1.0% saving in the Gross National Product (GNP) of many industrial counties, such as USA [3], UK [4] and China [5], can be achieved through a proactive practice of tribology that…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, by reducing friction by 1%, the annual fuel consumption worldwide is projected to be reduced by 1 billion liters based on the total consumption in 2015 [2]. Furthermore, more than 1.0% saving in the Gross National Product (GNP) of many industrial counties, such as USA [3], UK [4] and China [5], can be achieved through a proactive practice of tribology that…”
Section: Introductionmentioning
confidence: 99%
“…In fact, several studies have shown that the tribology and mechanics of these devices are the limiting factors to the imminent broad-based impact of nanotechnology on our everyday lives (Maboudian & Howe 1997;Bhushan 1998Bhushan , 2003Bhushan , 2007a. Miniaturization and the subsequent development of devices for nanotechnology applications require better tribological performance of the system components and a fundamental understanding of the basic phenomena underlying friction, wear and lubrication on the micro-and nanoscale (Bhushan 1997(Bhushan , 1998(Bhushan , 1999a(Bhushan ,b, 2001(Bhushan , 2007a. The components used in the micro/ nanostructures are very light (of the order of a few micrograms) and operate under very light loads (of the order of a few micrograms to a few milligrams).…”
Section: Introductionmentioning
confidence: 99%
“…Adhesion, friction and wear at the nanometer size scale become critical and can be detrimental to the efficiency, power output and reliability of MEMS/NEMS devices. [1,2] For example, adhesion is the major cause of the failure of accelerometers used in automobile air bag triggering mechanisms [3] and in micromirror components of commercial digital light processing (DLP) equipment. [2,[4][5][6][7] Wear has been found to compromise the performance of NEMS-based atomic force microscopy (AFM) data storage systems.…”
mentioning
confidence: 99%