Micro-lens Array Fabrication by Two Photon Polymerization Technology

Chung, Tien-Tung; Tu, Yi-Ting; Hsueh, Ya-Hsun; Chen, Sheng-Yuan; Li, Wan-Jou

doi:10.5875/ausmt.v2i2.186

Cited by 14 publications

(7 citation statements)

References 12 publications

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“…The nonlinear, multiphoton absorption of femtosecond laser energy can be strictly confined to a very small volume inside the material. Chung et al designed and fabricated MLAs by two photon polymerization (TPP) technology (Figure 7) (Chung et al, 2013). They manufactured the MLA using both horizontal slicing and vertical slicing methods.…”

Section: Microlenses Fabricating Techniquesmentioning

confidence: 99%

Microlenses arrays: Fabrication, materials, and applications

Cai

Sun

Chu

et al. 2021

Microscopy Res & Technique

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Microlenses have become an indispensable optical element in many optical systems. The advancement of technology has led to a wider variety of microlenses fabrication methods, but these methods suffer from, more or less, some limitations. In this article, we review the manufacturing technology of microlenses from the direct and indirect perspectives. First, we present several fabrication methods and their advantages and disadvantages are discussed. Then, we discuss the commonly used materials for fabricating microlenses and the applications of microlenses in various fields. Finally, we point out the prospects for the future development of microlenses and their fabrication methods.

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Section: Microlenses Fabricating Techniquesmentioning

confidence: 99%

Microlenses arrays: Fabrication, materials, and applications

Cai

Sun

Chu

et al. 2021

Microscopy Res & Technique

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“…The laser-off time that presents the delay between paths is preset before the manufacturing processes. 19 …”

Section: System Descriptionsmentioning

confidence: 99%

“…The structure of the TPP module is shown in Figure 1(c), 19 where the laser is filtered by the attenuator and adjusted by the beam expander. The dichroic mirror reflects the laser with a specific wavelength, and the objective lens focuses the laser beam into the resin.…”

Section: System Descriptionsmentioning

confidence: 99%

“…Wu et al 18 used TPP to improve the fabrication of a conventional aspheric micro-lens by femtosecond laser micro-nanofabrication. Chung et al 19 also used TPP to fabricate a 5 3 5 micro-lens array. Wang et al 20 integrated TPP with a long-stroke precision stage to fabricate 100 3 100 mm linear gratings and Fresnel zone plates (FZPs) with a radius of 47 mm.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1. The experimental equipment: (a) the integrated system, (b) the structure of the integrated stage, and (c) the TPP module 18,19. …”

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confidence: 99%

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Fabrication of large-scale micro-structures by two-photon polymerization with a long-stroke precision stage

Wang

Chung

et al. 2017

Advances in Mechanical Engineering

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This article demonstrates the fabrication of large-scale micro-structures by two-photon polymerization with an integrated long-stroke precision stage. We first design a three-axial stage that combines a piezoelectric transducer stage and a stepper-motor stage, and we apply gain-scheduling and robust control with a feedforward compensator to achieve nano-positioning within a travel range of 10 cm. We then integrate the precision stage with a two-photon polymerization module to manufacture large-scale micro-structures, including 1 mm linear gratings, 1 cm parallel lines, and 200 mm Fresnel zone plates. We further define performance indexes to evaluate the qualities of these products: the linear gratings achieve an image error of 4.73%, while the 1 cm lines have an average error of 0.2 mm with a standard deviation of 0.05 mm, and the Fresnel zone plates attain a focal error of 0.4% and a focus efficiency of 64%. These results confirm the effectiveness of the proposed use of the precision stage and two-photon polymerization for large-scale micro-structure manufacturing.

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Recent Advances on High‐Speed and Holographic Two‐Photon Direct Laser Writing

Balena

Bianco

Pisanello

et al. 2023

Adv Funct Materials

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Two‐Photon Lithography, thanks to its very high sub‐diffraction resolution, has become the lithographic technique par excellence in applications requiring small feature sizes and complex 3D pattering. Despite this, the fabrication times required for extended structures remain much longer than those of other competing techniques (UV mask lithography, nanoimprinting, etc.). Its low throughput prevents its wide adoption in industrial applications. To increase it, over the years different solutions have been proposed, although their usage is difficult to generalize and may be limited depending on the specific application. A promising strategy to further increase the throughput of Two‐Photon Lithography, opening a concrete window for its adoption in industry, lies in its combination with holography approaches: in this way it is possible to generate dozens of foci from a single laser beam, thus parallelizing the fabrication of periodic structures, or to engineer the intensity distribution on the writing plane in a complex way, obtaining 3D microstructures with a single exposure. Here, the fundamental concepts behind high‐speed Two‐Photon Lithography and its combination with holography are discussed, and the literary production of recent years that exploits such techniques is reviewed, and contextualized according to the topic covered.

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Micro-lens Array Fabrication by Two Photon Polymerization Technology

Cited by 14 publications

References 12 publications

Microlenses arrays: Fabrication, materials, and applications

Microlenses arrays: Fabrication, materials, and applications

Fabrication of large-scale micro-structures by two-photon polymerization with a long-stroke precision stage

Recent Advances on High‐Speed and Holographic Two‐Photon Direct Laser Writing

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