Micro-hotplates for high-throughput thin film processing and in situ phase transformation characterization

Hamann, Sven; Ehmann, M.; Thienhaus, Sigurd; Savan, Alan; Ludwig, Alfred

doi:10.1016/j.sna.2008.05.007

Cited by 29 publications

(15 citation statements)

References 15 publications

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“…The other splats show a much clearer non-linearity in the R(T) curve. In contrast to R(T) measurements of conventional shape memory alloys (SMAs) [15] and extremely rapidly quenched Fe 70 Pd 30 thin films using microhotplates [16], these samples show only weak changes in the R(T) curve with no determinable hysteresis width. Therefore it is not possible to distinguish between martensite start (M s ) and austenite finish (A f ) or martensite finish (M f ) and austenite start (A s ) temperature.…”

Section: Resultscontrasting

confidence: 64%

Development and characterization of Fe70Pd30 ferromagnetic shape memory splats

et al. 2010

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Section: Resultscontrasting

confidence: 64%

Development and characterization of Fe70Pd30 ferromagnetic shape memory splats

et al. 2010

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“…Sample B is a 1.4 lm thick thin film of Gd deposited on a membrane consisting of (from bottom to top) 600 nm SiO 2 , 130 nm Si 3 N 4 , 300 nm SiO 2 , and 100 nm Si 3 N 4 . 7 The sample was capped with 20 nm chromium to prevent oxidation and annealed for 1 h at 600 C. Sample C is a polycrystalline piece of LaFe 11.05 Co 0.91 Si 1.04 with a thickness of 1 mm, a lateral size of 10 Â 5 mm 2 , and porosity of 20% (same sample as in Ref. 8).…”

Section: @T @Hmentioning

confidence: 99%

Temperature dependent low-field measurements of the magnetocaloric ΔT with sub-mK resolution in small volume and thin film samples

Döntgen

Rudolph

Gottschall

et al. 2015

Applied Physics Letters

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We present temperature dependent ΔT measurements of the magnetocaloric effect in a thin film sample of Gd, employing magnetomodulation and detection of thermal radiation. A bulk sample of the metamagnetic material LaFe11.05Co0.91Si1.04 shows a strong broadening of the ΔT peak for increasing field amplitudes between 4 and 45 mT. Bulk Gd in comparison shows only a weak broadening. All investigated samples exhibit a clear quadratic dependence of ΔT on the external field Hext at the ΔT peak maximum, contrary to earlier predictions. An analytic expression is derived that interpolates between the Hext2-behavior at low and the well-known Hext2/3-behavior at high fields.

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“…Combinatorial synthesis is crucial for the discovery of novel materials for next-generation applications and for developing material libraries 1 – 9 . Combinatorial approaches are designed to enhance efficiency in materials science research by efficiently fabricating, processing, and surveying of a vast number of materials combinations suggested via theory and computational modeling 10 – 15 .…”

Section: Introductionmentioning

confidence: 99%

Combinatorial synthesis of heteroepitaxial, multi-cation, thin-films via pulsed laser deposition coupled with in-situ, chemical and structural characterization

Moon

Goyal

2022

Sci Rep

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Combinatorial synthesis via a continuous composition spread is an excellent route to develop thin-film libraries as it is both time- and cost-efficient. Creating libraries of functional, multicomponent, complex oxide films requires excellent control over the synthesis parameters combined with high-throughput analytical feedback. A reliable, high-throughput, in-situ characterization analysis method is required to meet the crucial need to rapidly screen materials libraries. Here, we report on the combination of two in-situ techniques—(a) Reflection high-energy electron diffraction (RHEED) for heteroepitaxial characterization and a newly developed compositional analysis technique, low-angle x-ray spectroscopy (LAXS), to map the chemical composition profile of combinatorial heteroepitaxial complex oxide films deposited using a continuous composition spread method via pulsed laser deposition. This is accomplished using a unique state-of-the-art combinatorial growth system with a fully synchronized four-axis mechanical substrate stage without shadow masks, alternating acquisition of chemical compositional data using LAXS at various different positions on the $$\sim$$ ∼ 41 mm $$\times$$ × 41 mm range and sequential deposition of multilayers of SrTiO$$_3$$ 3 and $$\hbox {SrTi}_{0.8}\hbox {Ru}_{0.2}\hbox {O}_3$$ SrTi 0.8 Ru 0.2 O 3 on a 2-inch (50.8 mm) $$\hbox {LaAlO}_3$$ LaAlO 3 wafer in a single growth run. Rutherford backscattering spectrometry (RBS) is used to calibrate and validate the compositions determined by LAXS. This study shows the feasibility of combinatorial synthesis of heteroepitaxial, functional complex oxide films at wafer-scale via two essential in-situ characterization tools—RHEED for structural analysis or heteroepitaxy and LAXS for compositional characterization. This is a powerful technique for development of new films with optimized heteroepitaxy and composition.

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Micro-hotplates for high-throughput thin film processing and in situ phase transformation characterization

Cited by 29 publications

References 15 publications

Development and characterization of Fe70Pd30 ferromagnetic shape memory splats

Development and characterization of Fe70Pd30 ferromagnetic shape memory splats

Temperature dependent low-field measurements of the magnetocaloric ΔT with sub-mK resolution in small volume and thin film samples

Combinatorial synthesis of heteroepitaxial, multi-cation, thin-films via pulsed laser deposition coupled with in-situ, chemical and structural characterization

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