“…The MHAS consists of a metal sheet with a densely packed micro-hole array ( d = 10 μm), driven by a ring-shaped piezoelectric ceramic (outer diameter 16 mm, inner diameter 8 mm). Under the action of an oscillating circuit and piezoelectric ceramic drive, the metal sheet vibrates at a high frequency of 108 kHz, rapidly ejecting a large number of liquid droplets out of micro-holes downwards at high speed (for detailed information, see the previous report by our research group 16 ). The droplets quickly land and adhere to the rigid substrate (high-purity Al or Si substrates, both 25 mm 25 mm 0.8 mm square pieces).…”