Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017 2017
DOI: 10.3390/proceedings1040385
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Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

Abstract: Abstract:In-plane shape memory alloy (SMA) actuators operated in agonist-antagonist mode are integrated on silicon micro-grippers. The actuator elements are cut out of sheet material in a femtosecond laser ablation process. The assembly process is carried out on wafer-level, and the fixation realized by galvanic riveting. The initial deformation of the differential actuators needed to access their actuation potential is implemented during the gripper connection to energy supply.

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Cited by 14 publications
(10 citation statements)
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“…Furthermore, the laser machining system includes a galvanometer scanner system (Scanlab RTC 5, Scanlab GmbH, Puchheim, Germany) embedded into a micromachining platform (Microstruct-C, 3DMicromac, Chemnitz, Germany). In the past, this laser system was already used to fabricate devices for nanoparticle precipitation [ 28 ], the analysis of pancreatic islets [ 29 ], point-of-care tests from nitrocellulose [ 30 ], and shape memory alloy (SMA) actuators made from NiTi material [ 31 ]. The fabrication process utilized in this work is shown in Figure 4 :…”
Section: Methodsmentioning
confidence: 99%
“…Furthermore, the laser machining system includes a galvanometer scanner system (Scanlab RTC 5, Scanlab GmbH, Puchheim, Germany) embedded into a micromachining platform (Microstruct-C, 3DMicromac, Chemnitz, Germany). In the past, this laser system was already used to fabricate devices for nanoparticle precipitation [ 28 ], the analysis of pancreatic islets [ 29 ], point-of-care tests from nitrocellulose [ 30 ], and shape memory alloy (SMA) actuators made from NiTi material [ 31 ]. The fabrication process utilized in this work is shown in Figure 4 :…”
Section: Methodsmentioning
confidence: 99%
“…Moreover, electromagnetic fields could disturb the measurement of the very weak electrical signals (in the picoampere range) during the electrophysiological measurements. Thermomechanical actuation, such as the shape memory alloy design [ 7 , 8 ], or the thermal expansion design [ 9 ], has the inevitable disadvantage of heat dissipation, which may impair the physiological function under study. These considerations limit the range of actuation principles that are compatible with the intended bioanalytical procedures to pneumatic, hydraulic, or mechanic actuations.…”
Section: Introductionmentioning
confidence: 99%
“…To introduce new robotic platforms to address the demands of the modern era, proper actuators and materials should be used to achieve the required specifications of the robotic platforms [13]. Shape memory alloys (SMA) [14], piezoelectric [15], Electrostatic MEMS [16], and hydraulic/pneumatic actuators [17] are among the widely used actuators to design better robots.…”
Section: Introductionmentioning
confidence: 99%