Micro Fresnel mirror array with individual mirror control

Abstract

We present the design and fabrication of a miniaturized array of piezoelectrically actuated high speed Fresnel mirrors with individual mirror control. These Fresnel mirrors can be used to generate propagation invariant and self-healing interference patterns. The mirrors are actuated using piezobimorph actuators, and the consequent change of the tilting angle of the mirrors changes the fringe spacing of the interference pattern generated. The array consists of four Fresnel mirrors each having an area of 2x2 mm 2 arranged in a 2x2 configuration. The device, optimized using FEM simulations, is able to achieve maximum mirror deflections of 15 mrad, and has a resonance frequency of 28 kHz.

Temperature-dependent asymmetric Prandtl-Ishlinskii hysteresis model for piezoelectric actuators

“…Their use in nanopositioning stages is well studied and limitations have continually been addressed to yield faster response, and better tracking accuracy [15,22,28]. These improvements have enabled several applications such as atomic force microscopy, scanning electron microscopy, as well as spectroscopy applications which may use arrays of PEAs to achieve improved performance [3,8,21].…”